Abstract:The solid phase crystallization (SPC) of amorphous silicon thin films by a novel modification of nucleation step was investigated at low temperature.The thin film consists of polycrystalline nanoparticles embedded in an amorphous matrix which can act as nuclei, resulting in a lower thermal energy for the nucleation. Thus, this energy can shorten the transition time from amorphous to polycrystalline silicon and lower the processing temperature. The crystallinity and the crystallized volume fraction of silicon t… Show more
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