Solid neon sources for plasmas and x-ray lasers

Dixon, R. H.; Ford, Jason C.; Lee, T. N.; Elton, R. C.

doi:10.1063/1.1138526

Cited by 6 publications

(1 citation statement)

References 4 publications

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“…Other cryogenic-target liquids with similar hydrodynamic properties as liquid nitrogen are oxygen, neon, argon, and xenon, which are suitable laser-plasma targets for, e.g., proximity and EUV projection lithography. Previous laserplasma x-ray source work on these elements includes frozen solid nitrogen, 9 xenon, 10,11 and neon, 12 which all exhibit significant debris emission and a high-pressure gas target system for xenon 11 having the disadvantage of low number density. Xenon especially has attracted interest due to its high atomic number which should theoretically result in a high conversion efficiency.…”

Section: Introductionmentioning

confidence: 99%

Cryogenic liquid-jet target for debris-free laser-plasma soft x-ray generation

Berglund

Rymell

Hertz

et al. 1998

Review of Scientific Instruments

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A new target system based on a continuous cryogenic liquid jet for debris-free laser-plasma soft x-ray generation is described. The system is experimentally evaluated with liquid nitrogen as target material. With this target the photon flux is 4.5ϫ10 11 photons/͑srϫpulse͒ from the ϭ2.88 nm N VI line. Brightness and stability are also investigated for this table-top soft x-ray microscope source. The possibility to utilize other cryogenic liquids such as neon, argon, and xenon and, thus, making the system interesting for short-wavelength lithography applications, is also discussed.

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Section: Introductionmentioning

confidence: 99%