1997 Proceedings 47th Electronic Components and Technology Conference
DOI: 10.1109/ectc.1997.606176
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Solder bumping methods for flip chip packaging

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Cited by 32 publications
(8 citation statements)
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“…The substrate containing the such as a ridge wave guide will be fabricated via mask based techniques. A light source such as a VCSEL can be fabricated on a separate plane chip bonding [2,3]. On the region of the chip which requires coupling there of photoresist.…”
Section: Fabrication Of 3d Optical Circuit Via Mixed Lithographmentioning
confidence: 99%
See 1 more Smart Citation
“…The substrate containing the such as a ridge wave guide will be fabricated via mask based techniques. A light source such as a VCSEL can be fabricated on a separate plane chip bonding [2,3]. On the region of the chip which requires coupling there of photoresist.…”
Section: Fabrication Of 3d Optical Circuit Via Mixed Lithographmentioning
confidence: 99%
“…To achieve integration in multiple dimensions, an efficient coupling of light between active and passive optics are required. For example, a surface grating structure [2], or alternatively we proposed a 45 degree surface micro mirror can be fabricated by gray-scale laser direct writing in a fully CMOS compatible manner and is used in conjunction with vertical cavity surface emitting lasers (VCSEL), although, a grating based coupler may be limited by its design spectral bandwidth.…”
Section: Introductionmentioning
confidence: 99%
“…In the past, several flip-chip studies focusing on solder bump deposition or varying solder compositions have been published [1]. A critical point is how to deposit a relatively large amount of an alloy with a low melting point and good reflow properties.…”
Section: Introductionmentioning
confidence: 99%
“…-nano copper wires interconnection [9] -metal post interconnection [7] -solder bump interconnection [10] -dimple array interconnection [7] -power overlay technology embedded power [2].…”
Section: Introductionmentioning
confidence: 99%