Sol-Gel Thin Film Processing for Integrated Waveguide Sensors

Alberti, Sebastián; Jágerská, Jana

doi:10.3389/fmats.2021.629822

Cited by 16 publications

(8 citation statements)

References 124 publications

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“…Later, fs-laser writing started to be used to fabricate 3D waveguides in sol–gel glasses [ 54 , 55 , 56 , 57 ] and soon became the most effective technique. An interesting review on sol–gel thin-film processing and patterning, with a focus on the application as integrated waveguide sensors, was recently published [ 58 ].…”

Section: Sol–gel Optical Waveguidesmentioning

confidence: 99%

Sol–Gel Photonic Glasses: From Material to Application

et al. 2023

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In this review, we present a short overview of the development of sol–gel glasses for application in the field of photonics, with a focus on some of the most interesting results obtained by our group and collaborators in that area. Our main attention is devoted to silicate glasses of different compositions, which are characterized by specific optical and spectroscopic properties for various applications, ranging from luminescent systems to light-confining structures and memristors. In particular, the roles of rare-earth doping, matrix composition, the densification process and the fabrication protocol on the structural, optical and spectroscopic properties of the developed photonic systems are discussed through appropriate examples. Some achievements in the fabrication of oxide sol–gel optical waveguides and of micro- and nanostructures for the confinement of light are also briefly discussed.

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Section: Sol–gel Optical Waveguidesmentioning

confidence: 99%

Sol–Gel Photonic Glasses: From Material to Application

et al. 2023

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“…Mesoporous inorganic and mesoporous hybrid inorganic-organic cladding, based on sol-gel chemistry, represent a robust alternative to polymers [111]. These materials are equally capable of providing partitioning for custom analytical tasks, while they exhibit advantageous optical, dielectric and thermal properties [112][113][114][115].…”

Section: Claddingmentioning

confidence: 99%

“…Furthermore, these materials have tunable pore volume that can surpass 50% and a decreased response time (in the order of seconds) in comparison to many polymers (typically in the order of minutes). Optical losses in VIS-NIR in these materials are generally low, due to their amorphous structure and small pore size [111]. Nevertheless, the transparency at longer wavelengths suffers due to OH groups and the adsorption of water on the large surface area of the pore network.…”

Section: Claddingmentioning

confidence: 99%

Integrated Nanophotonic Waveguide-Based Devices for IR and Raman Gas Spectroscopy

Alberti

Datta

Jágerská

2021

Sensors

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On-chip devices for absorption spectroscopy and Raman spectroscopy have been developing rapidly in the last few years, triggered by the growing availability of compact and affordable tunable lasers, detectors, and on-chip spectrometers. Material processing that is compatible with mass production has been proven to be capable of long low-loss waveguides of sophisticated designs, which are indispensable for high-light–analyte interactions. Sensitivity and selectivity have been further improved by the development of sorbent cladding. In this review, we discuss the latest advances and challenges in the field of waveguide-enhanced Raman spectroscopy (WERS) and waveguide infrared absorption spectroscopy (WIRAS). The development of integrated light sources and detectors toward miniaturization will be presented, together with the recent advances on waveguides and cladding to improve sensitivity. The latest reports on gas-sensing applications and main configurations for WERS and WIRAS will be described, and the most relevant figures of merit and limitations of different sensor realizations summarized.

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“…They also highlight the fact that, because of light confinement in the core of the waveguide, the increased light–analyte interaction results in enhanced sensitivity and fast response, which offers an optimal solution for real-time and on-site detection. In this context, the sol–gel process has been reported to be a suitable route for the elaboration of waveguide sensors (see a recent review in [ 17 ]), and some papers report on the sol–gel processing of waveguide-based integrated biosensors [ 1 , 5 , 7 ]. These studies demonstrate that the sol–gel process provides an ideal trade-off between low cost, easy implementation and optical quality, as well as mechanical and chemical robustness, and in particular, it can be conveniently implemented without employing any step requiring a clean room.…”

Section: Introductionmentioning

confidence: 99%

Setting Up and Assessing a New Micro-Structured Waveguiding Fluorescent Architecture on Glass Entirely Elaborated by Sol–Gel Processing

et al. 2022

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Channel waveguides with diffraction gratings at their input and output for light injection and extraction, respectively, are extensively exploited for optical and photonic applications. In this paper, we report for the first time on such an architecture on glass entirely elaborated by sol–gel processing using a titanium-oxide-based photoresist that can be imprinted through a single photolithography step. This work is more particularly focused on a fluorescent architecture including channel waveguides doped with a ruthenium-complex fluorophore (tris(4,7-diphenyl-1,10-phenanthroline)ruthenium(II), Rudpp). The study demonstrates that this original sol–gel micro-structured architecture is well adapted to efficient channel waveguide/diffraction grating coupling and propagation of the fluorescence excitation and emission signals in the core of the channel waveguide. It demonstrates, in particular, a relatively large tolerance of several degrees in the angular injection fiber positioning and an important axial and vertical fiber spatial positioning tolerance of more than 100 µm at the Rudpp emission wavelength. The measurements also indicate that, in the conditions tested in this work, a Rudpp concentration of around 0.1 mM and a channel waveguide length of 2 to 5 mm offer the best trade-off in terms of excitation signal propagation and emission signal detection. This work constitutes a promising preliminary step toward the integration of our architecture into a microfluidic platform for fluorescence measurement in a liquid medium and waveguiding configuration.

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Sol-Gel Thin Film Processing for Integrated Waveguide Sensors

Cited by 16 publications

References 124 publications

Sol–Gel Photonic Glasses: From Material to Application

Sol–Gel Photonic Glasses: From Material to Application

Integrated Nanophotonic Waveguide-Based Devices for IR and Raman Gas Spectroscopy

Setting Up and Assessing a New Micro-Structured Waveguiding Fluorescent Architecture on Glass Entirely Elaborated by Sol–Gel Processing

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