SOI-MEMS Bulk Piezoresistive Displacement Sensor: A Comparative Study of Readout Circuits

Maroufi, Mohammad; Nikooienejad, Nastaran; Mahdavi, Mohammad; Moheimani, S. O. Reza

doi:10.1109/jmems.2019.2952547

Cited by 5 publications

(1 citation statement)

References 32 publications

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“…The integrated vehicle navigation system based on trajectory tracking technology can realize vehicle positioning without GPS blind area at low cost [16]. Maroufi and others proposed that MEMS technology is widely used in aerospace, automotive electronics, automatic control, military, and other products [17]. Amjad and others designed an object motion trajectory detection system with MEMS capacitive acceleration sensor adxl345 as the core in order to accurately detect the object motion trajectory, increase the measurement range of object displacement, and reduce the measurement error.…”

Section: Literature Reviewmentioning

confidence: 99%

Motion Tracking and Detection System Based on Motion Sensor

Zhou

2022

Mobile Information Systems

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To solve the problem of large error of motion MEMS sensor in motion trajectory detection, a motion trajectory tracking and detection system based on motion sensor is proposed. The principle of trajectory tracking is that the three-dimensional velocity and displacement can be obtained by integrating the acceleration. In this paper, acceleration sensor is used to obtain acceleration data of moving object. In order to reduce the data measurement error, a Kalman filter is designed and implemented to eliminate random noise. Aiming at the system nonlinear error, a two speed sampling compensation algorithm is designed and implemented by using the random characteristics of kernel process scheduling algorithm. The system accuracy is significantly improved without increasing the computational burden. According to the characteristics of floating-point instruction system on Advanced RISC Machine (ARM) platform, the algorithms of process core modules such as square root and matrix multiplication are optimized and improved, which greatly improves the computing performance of the system. According to the results of the study, the average error of measurement of X-line displacement measurement of the space control system is 8.06%, the average error of measurement of Y-line displacement measurement is 7.41%, the average error of measurement of Z-line displacement measurement is 9.61%, and the average error of 3D dimensional measurement is 7.6%. The effectiveness and feasibility of the system are verified.

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Section: Literature Reviewmentioning

confidence: 99%