2019
DOI: 10.1007/s11018-019-01537-w
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Software-Hardware Systems for Measurement of Sample Displacements in Probe Microscopes

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“…Thus, to increase the reliability of the determination of the scan overlap parameters, several methods for estimating these parameters should be used [45]: first, algorithmic methods for the image processing; and second, the values of the sensors mounted on the sample-positioning platform or displacement values obtained on the basis of the signals the sample-positioning platform drives. In our SPM we use the positioning platform where the leadscrews for manual control are equipped with inertia piezo-drives and sensors [45].…”
Section: Complexing Of the Methods Of Images Overlap Estimationmentioning
confidence: 99%
“…Thus, to increase the reliability of the determination of the scan overlap parameters, several methods for estimating these parameters should be used [45]: first, algorithmic methods for the image processing; and second, the values of the sensors mounted on the sample-positioning platform or displacement values obtained on the basis of the signals the sample-positioning platform drives. In our SPM we use the positioning platform where the leadscrews for manual control are equipped with inertia piezo-drives and sensors [45].…”
Section: Complexing Of the Methods Of Images Overlap Estimationmentioning
confidence: 99%