Soft X-ray nanoscale imaging using a sub-pixel resolution charge coupled device (CCD) camera

Lübcke, A.; Braenzel, J.; Dehlinger, A.; Schnürer, M.; Stiel, H.; Rehbein, Stefan; Schneider, Gerd; Werner, Stephan; Kemmler, Roman; Ritter, Sebastian; Raugust, M.; Wende, Torsten; Behrendt, Marcel; Regehly, Martin

doi:10.1063/1.5053593

Cited by 7 publications

(4 citation statements)

References 16 publications

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“…The resolution of the compact microscopes can be improved by employing a zone plate with a larger number of zones or by using high-repetition-rate lasers, to increase the photon flux on the sample plane and decrease the exposure time. The employment of a sub-pixel super-resolution camera in SXR represents also a solution to improve the actual achievements [62]. Moreover, the possibility to equip the presented full field microscopes with a cryo-stage, could make possible to image in vivo biological samples.…”

Section: Discussionmentioning

confidence: 99%

“…Despite the employed FZPs allow achieving a sub-10 nm spatial resolution [61], it is still challenging to find a necessary compromise between the exposure time and the size and complexity of the microscope's architecture [42]. Several parameters can be improved to overcome this trade-off, such as obtaining high photon flux and repetition rate minimizing the debris production, increasing the charge-coupled device (CCD) resolution [62], etc.…”

Section: Introductionmentioning

confidence: 99%

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Biological Applications of Short Wavelength Microscopy Based on Compact, Laser-Produced Gas-Puff Plasma Source

et al. 2020

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Over the last decades, remarkable efforts have been made to improve the resolution in photon-based microscopes. The employment of compact sources based on table-top laser-produced soft X-ray (SXR) in the “water window” spectral range (λ = 2.3–4.4 nm) and extreme ultraviolet (EUV) plasma allowed to overcome the limitations imposed by large facilities, such as synchrotrons and X-ray free electron lasers (XFEL), because of their high complexity, costs, and limited user access. A laser-plasma double stream gas-puff target source represents a powerful tool for microscopy operating in transmission mode, significantly improving the spatial resolution into the nanometric scale, comparing to the traditional visible light (optical) microscopes. Such an approach allows generating the plasma efficiently, without debris, providing a high flux of EUV and SXR photons. In this review, we present the development and optimization of desktop imaging systems: a EUV and an SXR full field microscope, allowing to achieve a sub-50 nm spatial resolution with short exposure time and an SXR contact microscope, capable to resolve internal structures in a thin layer of sensitive photoresist. Details about the source, as well as imaging results for biological applications, will be presented and discussed.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Biological Applications of Short Wavelength Microscopy Based on Compact, Laser-Produced Gas-Puff Plasma Source

et al. 2020

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“…When compared to pnCCD and EM-CCD in the role as an energy-dispersive, integrating detector, it lacks in energy resolution [20] and frame rate (24 full frames per second compared to up to 1000 Hz for the pnCCD), but stands out because of its large pixel array (2048 × 2048 pixels) and small pixel size. This advantage can be important in certain applications, for example scan-free GEXRF [16,21], microscopic applications [22] and also wavelength-dispersive spectrometry [23]. The latter two methods can benefit from noise suppression and sub-pixel resolution via single-photon event evaluation.…”

Section: Jinst 16 P03033mentioning

confidence: 99%

Towards soft x-ray fluorescence measurements in the laboratory using a laser-produced plasma source and a complementary metal-oxide semiconductor detector

Staeck¹,

Kayser²,

Baumann³

et al. 2021

J. Inst.

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With the advent of commercially available CMOS technology suitable for direct detection of photons in the soft X-ray range, new possibilities are opening up for the improvement and optimization of experiments requiring energy discrimination capabilities in this energy range. SDDs are widely used as energy-dispersive detectors, but they cannot be used with pulsed sources due to the overwhelming temporal photon density. Wavelength-dispersive solutions offer unmatched energy resolution, but suffer from low detection efficiency and a limited energy bandwidth which can be monitored. The use of common CCDs as energy-dispersive detectors in this energy range is limited by their energy resolution and especially their readout speed, which can result in significant experimental dead time and limits the usable frequency of pulsed sources. Therewhile, CMOS detectors with high energy resolution and high frame rates are an efficient, versatile and cost-effective alternative as detectors for pulsed sources. In this work we present the characterization of a commercially available, backside-illuminated CMOS detector regarding its energy resolution and quantum efficiency at the BESSY II synchrotron radiation facility with a well-known soft X-ray radiation source. Furthermore it is used in a proof of principle XRF measurement with a laboratory-based laser-plasma source.

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“…However, thanks to their high sensitivity and high quantum efficiency, an individual photon counting is possible in each pixel, which drives the widespread use of CCDs. Methods to bypass this limitation in pixel size have been designed to decrease numerically the pixel size using sub-pixel displacements of the detection chip for super-resolution [4].…”

Section: Introductionmentioning

confidence: 99%

Lithium fluoride detectors for high spatial resolution imaging of tabletop XUV from high harmonic generation in gases

et al. 2021

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As high harmonic generation (HHG) sources have proliferated, the need for high resolution, affordable extreme ultraviolet (XUV) detectors has become ubiquitous. We studied lithium fluoride (LiF) crystals, traditionally used for x rays, as a detector for a tabletop XUV source from high harmonic generation in gases. The LiF response curve showed a dynamic range of 10 3 (not saturated), with a minimum threshold fluence of 66 µ J / c m 2 . Imaging tests were performed revealing sub-micrometer spatial resolution. We successfully recorded a scan of the focal plane of a Fresnel zone plate with high dynamic range. With this study, we showed that LiF can be used as a detector for HHG XUV, with a high potential to do near field imaging of complex objects such as the focus of structured light.

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Soft X-ray nanoscale imaging using a sub-pixel resolution charge coupled device (CCD) camera

Cited by 7 publications

References 16 publications

Biological Applications of Short Wavelength Microscopy Based on Compact, Laser-Produced Gas-Puff Plasma Source

Biological Applications of Short Wavelength Microscopy Based on Compact, Laser-Produced Gas-Puff Plasma Source

Towards soft x-ray fluorescence measurements in the laboratory using a laser-produced plasma source and a complementary metal-oxide semiconductor detector

Lithium fluoride detectors for high spatial resolution imaging of tabletop XUV from high harmonic generation in gases

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