Soft X-ray microscopy in the spectral region of “carbon window” with the use of multilayer optics and a laser-plasma source

Artyukov, I. A.; Виноградов, А. В.; Bugayev, Ye.A.; Devizenko, A. Yu.; Кондратенко, В. В.; Kas'yanov, Yu. S.

doi:10.1134/s1063776109110156

Cited by 11 publications

(10 citation statements)

References 43 publications

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“…Moreover, the conjugation of both mirrors in the SO ensemble required also a mutual tuning of their reflectivity curves over the all working aperture to achieve the spectral overlapping. 49,50 The "at-wavelength" measurements of these deposited Co/C mirrors showed the near-normal incidence reflectivity coefficient 4.5-6% for both concave and convex mirrors (Fig. 17).…”

Section: Optical Performance Of Co/c Mirrors At the "Carbon Window" Wmentioning

confidence: 94%

“…This sort of high spatial resolution optical systems based on normal-incidence XMMs is rather popular in various soft X-ray imaging and focusing experiments. 1,2,[48][49][50][51][52] This deposition work required special efforts to get the mirrors' reflectivity bands overlapped (see below). Figure 16.…”

Section: Optical Performance Of Co/c Mirrors At the "Carbon Window" Wmentioning

confidence: 99%

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Short-Period Multilayer X-ray Mirrors for “Water” and “Carbon Windows” Wavelengths

Kopylets

Devizenko

Zubarev

et al. 2019

j nanosci nanotechnol

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This review paper summarizes and provides an overview of our recent studies related to two types of short-period multilayer X-ray mirrors, W/B 4 C and Co/C. It deals with the experimental observation of the layer intermixing effects and how they affect the X-ray mirror's optical performance. The paper presents also some examples of using the fabricated X-ray mirrors in focusing and imaging experiments at the working wavelengths 2.48 nm and 4.47 nm.

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Section: Optical Performance Of Co/c Mirrors At the "Carbon Window" Wmentioning

confidence: 94%

Section: Optical Performance Of Co/c Mirrors At the "Carbon Window" Wmentioning

confidence: 99%

Short-Period Multilayer X-ray Mirrors for “Water” and “Carbon Windows” Wavelengths

Kopylets

Devizenko

Zubarev

et al. 2019

j nanosci nanotechnol

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show abstract

“…From our previous results we know that in the Co/C multilayer system with Co thickness varying in the nm‐scale structural transformation of cobalt layer takes place 15, 16. The effect is visualized in Fig.…”

Section: Sample Preparationmentioning

confidence: 96%

Structural and magnetic phenomena in ultrathin C/Co/C stacks prepared by DC magnetron sputtering

Zolotaryov¹,

Bugayev²,

Samofalov³

et al. 2011

Physica Status Solidi (a)

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We study two C(5 nm)/Co/C(5 nm) multilayer stacks with cobalt layer thicknesses of 4 and 13 nm. Structural analysis of fabricated systems reveals corresponding cobalt layers to be in amorphous (nanocrystalline) and [0001]-textured hcp-phase. The magnetic measurements for both systems agree well with structural data. For the amorphous cobalt layer magnetic data reveal the absence of carbides, high saturation field of 1.6 Â 10 4 Oe and vanishing inplane coercive field. We also show that strong inplane anisotropy can be introduced into the amorphous cobalt film by controlling the process parameters of DC-magnetron sputtering. For the textured hcp-cobalt film we have deduced the presence of randomly close-packed (rcp) structure. We assume this defect-rich cobalt hcp-phase to be responsible for the detected elimination of the out-of-plane magnetic anisotropy in the corresponding multilayer sample.

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“…The dependence of the inverse period in the form of the hyperbolic tangent from this subsection will be used in the numerical experiments of the section 4, which are aimed at verifying the suitability of the coupled wave equations (7) for the description of the graded multilayers.…”

Section: Hyperbolic Tangent Casementioning

confidence: 99%

“…However, various applications of the reflective X-ray optics including those in the X-ray astronomy [4,5], soft X-ray microscopy [6,7] and EUV/BEUV lithography [8] would be much better served by the broadband aperiodic reflective multilayer coatings having extended reflectivity bands both in the wavelength and angular domains. This advantage is related to the ability of such optical elements to effectively utilize the radiation coming from broadband X-ray and EUV sources such free electron lasers, which could also significantly improve the spatial resolution and reduced the speckle artifacts.…”

Section: Introductionmentioning

confidence: 99%

A theory of reflective X-ray multilayer structures with graded period and its applications

Feshchenko

2021

Preprint

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In this paper a theory of reflective X-ray multilayer structures with a graded (slowly varying) period based on the coupled waves method and quasi-classical asymptotic expansions is reported. A number of exact solutions of the coupled wave equations is obtained and analyzed demonstrating suitability of this method for the description of the reflective properties of the graded multilayers. The developed theory is then used as a basis for the solution of the inverse problem, i.e. designing multilayer structures with a pre-specified reflectivity dependence on the wavelength or grazing angle. A number numerical experiments is conducted to demonstrate the capabilities of the proposed method in designing reflective multilayer coatings with an arbitrary shape of the reflectivity curve. The problem of maximization of the integral reflectivity is considered and a second order differential equation, which solutions correspond to multilayer structures with the maximal reflectivity, is derived. Finally, an upper limit on the integral reflectivity achievable with a graded multilayer is estimated.

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Soft X-ray microscopy in the spectral region of “carbon window” with the use of multilayer optics and a laser-plasma source

Cited by 11 publications

References 43 publications

Short-Period Multilayer X-ray Mirrors for “Water” and “Carbon Windows” Wavelengths

Short-Period Multilayer X-ray Mirrors for “Water” and “Carbon Windows” Wavelengths

Structural and magnetic phenomena in ultrathin C/Co/C stacks prepared by DC magnetron sputtering

A theory of reflective X-ray multilayer structures with graded period and its applications

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