Soft X‐ray Microcopy at the ALS

Progress of Surface and Interface Science Using Synchrotron Radiation

“…In 1993, the Advanced Light Source (ALS) in the US started operation as the world's first third-generation synchrotron light source facility. The characteristic of the third-generation light source is its small beam size with small divergence (i.e., low emittance), and therefore, combining conventional measurement techniques microscopy with was started [56]. One technique enables microscopic imaging by narrowing the beam size with optical elements, and this technique has a scanning mode and an imaging mode.…”

Glass Monocapillary X-ray Optics And Their Applications In X-ray Microscopy

“…Full-field x-ray microscopy has made great progress in recent years [1,2,3]; and a spatial resolution of 15nm has been reported [4]. Commercial x-ray microscopes using synchrotron sources and laboratory x-ray sources are already available [5].…”