2010
DOI: 10.1016/j.micron.2010.06.011
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Soft X-ray imaging of thick carbon-based materials using the normal incidence multilayer optics

Abstract: The high transparency of carbon-containing materials in the spectral region of "carbon window" (lambda approximately 4.5-5nm) introduces new opportunities for various soft X-ray microscopy applications. The development of efficient multilayer coated X-ray optics operating at the wavelengths of about 4.5nm has stimulated a series of our imaging experiments to study thick biological and synthetic objects. Our experimental set-up consisted of a laser plasma X-ray source generated with the 2nd harmonics of Nd-glas… Show more

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Cited by 15 publications
(8 citation statements)
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“…This sort of high spatial resolution optical systems based on normal-incidence XMMs is rather popular in various soft X-ray imaging and focusing experiments. 1,2,[48][49][50][51][52] This deposition work required special efforts to get the mirrors' reflectivity bands overlapped (see below). Figure 16.…”
Section: Optical Performance Of Co/c Mirrors At the "Carbon Window" Wmentioning
confidence: 99%
See 1 more Smart Citation
“…This sort of high spatial resolution optical systems based on normal-incidence XMMs is rather popular in various soft X-ray imaging and focusing experiments. 1,2,[48][49][50][51][52] This deposition work required special efforts to get the mirrors' reflectivity bands overlapped (see below). Figure 16.…”
Section: Optical Performance Of Co/c Mirrors At the "Carbon Window" Wmentioning
confidence: 99%
“…X-ray multilayer mirrors (XMMs) are known to be one of the most popular X-ray optical elements that have been used in a lot of imaging and focusing X-ray experiments. 1,2 The obvious advantages of XMMs, such as large clear aperture, near-normal incidence operation mode, spectral selectivity and mechanical and thermal stability make them to be the best choice in many X-ray optical applications based on a compact X-ray source. * Author to whom correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%
“…Recent experiments have employed the LPP technique using metal targets to generate EUV/SXR radiation. For example, a bulk rhenium target was used to develop new SXR microscopy applications in the 'carbon window' (λ ≈ 4.5-5 nm) [35]. Also a solid gold-based LPP source was utilized in the design of an EUV source and optics setup to achieve high energy density and spatial resolution in a compact setup [36].…”
Section: Introductionmentioning
confidence: 99%
“…The carbon layer thickness 5 nm is enough to protect the Co layer from the substrate and the ambient air influence 17. In addition, a three‐layer stack is a model unit for the Co/C multilayer system that has been developed for the reflective coating in X‐ray microscopy of a “carbon window” ( λ ∼ 4.5 nm) 2, 18.…”
Section: Sample Preparationmentioning
confidence: 99%