Soft X-ray dosimetry and its application on the lithography beamline at SSRL

Seligson, Daniel; Pan, Lehua; King, Paul L.; Pianetta, P.

doi:10.1016/0168-9002(88)90454-8

Cited by 21 publications

(4 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…F c is a function representing the transmission of TR through the lithography mask, and its partial absorption in the photoresist. Its formulation is in accordance with the experimental result (Seligson et al, 1988) that the sensitivity of some XRL photoresists depends uniquely on the absorbed dose density (mJ cm À3 ) of TR, independent of the photon energy.…”

Section: Sensitivity Of Xrl Photoresist To Tr Emitted By a Storagerinsupporting

confidence: 74%

Theory and characteristics of transition radiation emitted by low-energy storage-ring synchrotrons for use in X-ray lithography

Minkov¹,

Yamada

Toyosugi³

et al. 2006

J Synchrotron Radiat

View full text Add to dashboard Cite

Existing theory is developed further for description of transition radiation (TR) emitted by low-energy storage-ring synchrotrons. It takes into account the fact that the dielectric constant of the TR target material is a complex function, introduces an expression for the number of passes of an injected electron through the target, and accounts more precisely for the absorption of TR. It is shown that the consideration of the complexity of the dielectric constant results in notable changes of the TR spectrum for emitted photons with energies close to the ionization energies of the target material. Since such TR is used mostly for performing X-ray lithography (XRL), the sensitivity of the photoresist used in XRL is formulated. Maximization of this resist sensitivity can be used for designing optimum targets for XRL. Study of the transmission of TR through a commonly used XRL mask, and its partial absorption in a common photoresist, illustrates that TR emission with E = [490, 1860] eV is most useful for performing such XRL, while E approximately equal to 1 keV is best. It is shown that, for a particular target material, a target consisting of only one foil emits the most TR energy. Optimization of an Al target, based on maximization of the resist sensitivity, indicates that a target containing one Al foil with a thickness of about 200 nm would be best for performing XRL by our low-energy storage-ring synchrotron MIRRORCLE-20SX.

show abstract

Section: Sensitivity Of Xrl Photoresist To Tr Emitted By a Storagerinsupporting

confidence: 74%

Theory and characteristics of transition radiation emitted by low-energy storage-ring synchrotrons for use in X-ray lithography

Minkov¹,

Yamada

Toyosugi³

et al. 2006

J Synchrotron Radiat

View full text Add to dashboard Cite

show abstract

“…However, they do not energy-resolve the incident photons and are also sensitive to photons with energies in the visible and UV ranges. While the quantum efficiency of such devices increases with photon energy, and substantially larger currents are observed at X-ray energies relative to the visible and UV, 11 photodiodes generally produce XA spectra with larger but generally constant backgrounds relative to energy-resolved detection devices. Because photodiodes do not discriminate photon energies, data collected with such detectors are typically referred to as total fluorescence yield (TFY) spectra.…”

Section: Nexafs/xanesmentioning

confidence: 99%

Soft X-ray Absorption Spectroscopy of Liquids and Solutions

2017

View full text Add to dashboard Cite

X-ray absorption spectroscopy (XAS) is an electronic absorption technique for which the initial state is a deeply buried core level. The photon energies corresponding to such transitions are governed primarily by the binding energies of the initial state. Because the binding energies of core electrons vary significantly among atomic species, this makes XAS an element-selective spectroscopy. Proper interpretation of XA spectra can provide detailed information on the local chemical and geometric environment of the target atom. The introduction of liquid microjet and flow cell technologies into XAS experiments has enabled the general study of liquid samples. Liquids studied to date include water, alcohols, and solutions with relevance to biology and energy technology. This Review summarizes the experimental techniques employed in XAS studies of liquid samples and computational methods used for interpretation of the resulting spectra and summarizes salient experiments and results obtained in the XAS investigations of liquids.

show abstract

“…Major interesting research and development areas to be noted are the study of plasmas radiating in the soft X -ray region as encountered in the magnetic and laser fusion programs [1], X -ray astronomy [2], X -ray lithography for developing submicron electronic integrated circuits [3], imaging at submicron resolution for biological applications [4] and fundamental studies in atomic, molecular and solid state spectroscopy [5]. A simple diagram of a typical X -ray measurement system is _ shown in This paper describes the recently developed silicon photodiode detectors exhibiting extremely high quantum efficiency and stability in the vacuum UV and soft X -ray region (This region has been called X -UV region in this paper as the same photodiode can be used as an excellent detector over the complete spectral region which classically has been separated as vacuum UV, extreme UV and soft X -ray regions.).…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Silicon Photodiodes With Stable, Near-Theoretical Quantum Efficiency In The Soft X-Ray Region

Korde

Canfield

1989

SPIE Proceedings

View full text Add to dashboard Cite

Silicon photodiodes having practically no carrier recombination at the Si -Si02 interface or in the front diffused region have been developed by defect -free n -type impurity diffusion into p -type silicon.These photodiodes exhibit very high quantum efficiencies in the 10 eV to 150 eV photon energy region, typically 37 electrons per photon at 150 eV, which is about 300 times the quantum efficiency of the more commonly used photoemissive type soft X -ray detectors. The quantum efficiency of the developed diodes has been found to be stable to a few percent after exposure to photons in the region of 5eV to 200eV, with fluences in excess of 1014/cm2. No significant change in the quantum efficiency was observed after storage in air for several months.

show abstract

Soft X-ray dosimetry and its application on the lithography beamline at SSRL

Cited by 21 publications

References 2 publications

Theory and characteristics of transition radiation emitted by low-energy storage-ring synchrotrons for use in X-ray lithography

Theory and characteristics of transition radiation emitted by low-energy storage-ring synchrotrons for use in X-ray lithography

Soft X-ray Absorption Spectroscopy of Liquids and Solutions

Silicon Photodiodes With Stable, Near-Theoretical Quantum Efficiency In The Soft X-Ray Region

Contact Info

Product

Resources

About