We report on the experimental and theoretical interpretation of the diffraction of a probe beam during inscription of a surface relief grating with an interference pattern into a photo-responsive polymer film. For this we developed a set-up allowing for the simultaneous recording of the diffraction efficiency (DE), the fine structure of the diffraction spot and the topographical changes, in situ and in real time while the film is irradiated. The time dependence of the DE, as the surface relief deepens, follows a Bessel function exhibiting maxima and minima. The size of the probe beam relative to the inscribed grating (i.e., to the size of the writing beams) matters and has to be considered for the interpretation of the DE signal. It is also at the origin formation, laser physics, photonic materials and devices, optical and laser materials, use of laser radiation in biophotonics, chemistry and biochemistry Figure S1. (a) In-situ recorded SRG height and 1 st. order diffraction efficiency (DE) of the poly(MMA-co-DR1A) polymer film during irradiation with a ±45° interference pattern. (b) Dependence of the DE signal on SRG height. The chemical structure of the polymer is shown in the inset. ( = 491nm, = 200mW/cm 2 , Λ = 2μm, = 600nm)