Soft Magnetic Properties of Fe-N Films Composed of Two Phases.

重男, 藤井; 繁弘, 大沼; 啓安, 藤森; 健, 増本

doi:10.3379/jmsjmag.17.333

Cited by 3 publications

(1 citation statement)

References 7 publications

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“…A similar result is reported for the FeN sputtered films. 29) The FeNiN films with 8-12 at.% nitrogen concentrations deposited at 120-180 C, in which 00 phase gathered, showed high Bs of 2.2-2.3 T, which is larger than that of pure iron, but it is less than the value (2.9 T) of Sugita and Komuro reported for single crystal and single phase 00 -Fe 16 N 2 films. 10,11) This may be explained by: (1) the exact volume fraction of the 00 phase in the film was very difficult to determine from XRD; (2) an amount of 0 phase existed in the film; (3) a part of Fe atoms replaced by Ni atoms.…”

Section: Resultsmentioning

confidence: 78%

High Moment FeNiN Films Prepared by Dual Ion Beam Sputtering

Wang

et al. 2002

Jpn. J. Appl. Phys.

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High moment FeNiN films with soft magnetic properties were prepared on glass and Si (100) substrates by a dual ion beam sputtering (DIBS) system. Effects of nitrogen concentrations and substrate temperatures on the phase structure and magnetic properties of FeNiN films were investigated. Nitrogen concentration of the FeNiN film was saturated to 20 at.% as nitrogen partial pressure was higher than 3 Â 10 À2 Pa. FeNiN films consisted of -(FeNi), 00 -(Fe,Ni) 16 N 2 , 0 -(Fe,Ni) 4 N phases or a mixture of these phases under different deposition parameters. The magnetic properties depended dramatically on the phase structure. FeNiN films with 8-12 at.% nitrogen concentrations deposited at 140-180 C exhibited 00 -(Fe,Ni) 16 N 2 and 0 -(Fe,Ni) 4 N phases, high saturation magnetization of 2.2-2.3 T and low coercivity of 80-110 A/m.

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Section: Resultsmentioning

confidence: 78%

High Moment FeNiN Films Prepared by Dual Ion Beam Sputtering

Wang

et al. 2002

Jpn. J. Appl. Phys.

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Structure and Soft Magnetic Properties of Fe–N Thin Films RF-Sputtered on Heated Substrate

et al. 1997

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Physical Properties of Fe Particles Fine-dispersed in AlN Thin Films

Han¹,

Kim²

2011

Korean. J. Mater. Res.

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This paper describes the fabrication of AlN thin films containing iron and iron nitride particles, and the magnetic and electrical properties of such films. Fe-N-Al alloy films were deposited in Ar and N 2 mixtures at ambient temperature using Fe/Al composite targets in a two-facing-target DC sputtering system. X-ray diffraction results showed that the Fe-N-Al films were amorphous, and after annealing for 5 h both AlN and bcc-Fe/bct-FeN x phases appeared. Structure changes in the FeN x phases were explained in terms of occupied nitrogen atoms. Electron diffraction and transmission electron microscopy observations revealed that iron and iron nitride particles were randomly dispersed in annealed AlN films. The grain size of magnetic particles ranged from 5 to 20 nm in diameter depending on annealing conditions. The saturation magnetization as a function of the annealing time for the Fe 55 N 20 Al 25 films when annealed at 573, 773 and 873 K. At these temperatures, the amount of iron/iron nitride particles increased with increasing annealing time. An increase in the saturation magnetization is explained qualitatively in terms of the amount of such magnetic particles in the film. The resistivity increased monotonously with decreasing Fe content, being consistent with randomly dispersed iron/iron nitride particles in the AlN film. The coercive force was evaluated to be larger than 6.4 × 10 3 Am −1 (80 Oe). This large value is ascribed to a residual stress restrained in the ferromagnetic particles, which is considered to be related to the present preparation process.

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Soft Magnetic Properties of Fe-N Films Composed of Two Phases.

Cited by 3 publications

References 7 publications

High Moment FeNiN Films Prepared by Dual Ion Beam Sputtering

High Moment FeNiN Films Prepared by Dual Ion Beam Sputtering

Structure and Soft Magnetic Properties of Fe–N Thin Films RF-Sputtered on Heated Substrate

Physical Properties of Fe Particles Fine-dispersed in AlN Thin Films

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Soft Magnetic Properties of Fe-N Films Composed of Two Phases.

Cited by 3 publications

References 7 publications

High Moment FeNiN Films Prepared by Dual Ion Beam Sputtering

High Moment FeNiN Films Prepared by Dual Ion Beam Sputtering

Structure and Soft Magnetic Properties of Fe&ndash;N Thin Films RF-Sputtered on Heated Substrate

Physical Properties of Fe Particles Fine-dispersed in AlN Thin Films

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Structure and Soft Magnetic Properties of Fe–N Thin Films RF-Sputtered on Heated Substrate