Sn1–xGexOy and Zn1–xGexOy by Atomic Layer Deposition─Growth Dynamics, Film Properties, and Compositional Tuning for Charge Selective Transport in (Ag,Cu)(In,Ga)Se2 Solar Cells
Adam Hultqvist,
Jan Keller,
Natalia M. Martin
et al.
Abstract:Two inorganic electron-selective layers (ESLs), Sn 1−x Ge x O y (TGO) and Zn 1−x Ge x O y (ZGO), were developed by using atomic layer deposition (ALD) with in situ quartz crystal monitoring. To ensure (Ag,Cu)(In,Ga)Se 2 (ACIGS) solar cell compatibility, a 120 °C ALD process was developed for GeO y using Ge(N(CH 3 ) 2 ) 4 and H 2 O as precursors. In the ALD supercycle approach, the GeO y ALD cycle was interchanged with either ZnO or SnO y cycles to deposit TGO and ZGO with varying conduction band positions (E c… Show more
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