2020
DOI: 10.1109/tsm.2020.3001933
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SMT2020—A Semiconductor Manufacturing Testbed

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Cited by 28 publications
(8 citation statements)
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“…At the exposure step, photolithography systems create detailed patterns on the silicon wafers. These systems cost more than e100 million, and they constitute the bottleneck in the entire front-end fabrication process (Kopp et al 2020). As a result, the downtime of these systems costs chip manufacturers up to e72,000 per hour (ASML B.V. 2014).…”
Section: Contextmentioning
confidence: 99%
“…At the exposure step, photolithography systems create detailed patterns on the silicon wafers. These systems cost more than e100 million, and they constitute the bottleneck in the entire front-end fabrication process (Kopp et al 2020). As a result, the downtime of these systems costs chip manufacturers up to e72,000 per hour (ASML B.V. 2014).…”
Section: Contextmentioning
confidence: 99%
“…We currently aim to apply the successful (Machine-based) decomposition strategies, overlapping and compression, to semiconductor manufacturing systems. In order to accomplish this, we are currently working on a dataset generated from a simulator called SMT2020 [10]. The advantage of this dataset is that it links between the academic and industrial perspectives.…”
Section: Expected Achievementmentioning
confidence: 99%
“…The advantage of this dataset is that it links between the academic and industrial perspectives. Since the SMT2020 data set is quite big, it is not possible to provide a schedule with a simulator that simulates the system for 2 years, as has been presented in [10] using ASP. We aim to develop a scheduler model that could provide a schedule in the manufacturing system for a short period, like one week.…”
Section: Expected Achievementmentioning
confidence: 99%
“…Previous work done by Fowler describes a model for semiconductor manufacturing consisting of four levels of simulation including individual tools, the manufacturing site, internal supply chain, and the end-to-end supply chain (Fowler, Mönch, and Ponsignon 2015). An overview of reference models for semiconductor manufacturing sites is provided by Kopp et al (2020) who compare the scale of different models, including the Intel Minifab, MIMAC, Harris, and SEMATECH 300 models.…”
Section: Related Workmentioning
confidence: 99%