Smectic hybrid oligo(dimethylsiloxane) liquid crystal for nanopatterning

Nickmans, Koen; Schenning, Albert P. H. J.

doi:10.1117/12.2266586

Cited by 1 publication

(1 citation statement)

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“…By making use of discrete ODMS developed in the Meijer and co‐workers, our group recently prepared ODMS‐based LCs consisting of an azobenzene core and ODMS side tails ( Figure ). Based on a traditional rod‐coil design, these materials form smectic and columnar liquid‐crystalline phases at room temperature, with lattice constants between 3.0 and 5.1 nm. Figure a shows the chemical structure of LC‐22Si, which consists of 11 DMS units on either side of the molecule.…”

Section: Fabrication Of Inorganic Sub‐5 Nm Patternsmentioning

confidence: 99%

Directed Self‐Assembly of Liquid‐Crystalline Molecular Building Blocks for Sub‐5 nm Nanopatterning

Nickmans

Schenning

2017

Advanced Materials

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The thin‐film directed self‐assembly of molecular building blocks into oriented nanostructure arrays enables next‐generation lithography at the sub‐5 nm scale. Currently, the fabrication of inorganic arrays from molecular building blocks is restricted by the limited long‐range order and orientation of the materials, as well as suitable methodologies for creating lithographic templates at sub‐5 nm dimensions. In recent years, higher‐order liquid crystals have emerged as functional thin films for organic electronics, nanoporous membranes, and templated synthesis, which provide opportunities for their use as lithographic templates. By choosing examples from these fields, recent progress toward the design of molecular building blocks is highlighted, with an emphasis on liquid crystals, to access sub‐5 nm features, their directed self‐assembly into oriented thin films, and, importantly, the fabrication of inorganic arrays. Finally, future challenges regarding sub‐5 nm patterning with liquid crystals are discussed.

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Section: Fabrication Of Inorganic Sub‐5 Nm Patternsmentioning

confidence: 99%