Smart single-chip gas sensor microsystem

Abstract

Research activity in chemical gas sensing is currently directed towards the search for highly selective (bio)chemical layer materials, and to the design of arrays consisting of different partially selective sensors that permit subsequent pattern recognition and multi-component analysis. Simultaneous use of various transduction platforms has been demonstrated, and the rapid development of integrated-circuit technology has facilitated the fabrication of planar chemical sensors and sensors based on three-dimensional microelectromechanical systems. Complementary metal-oxide silicon processes have previously been used to develop gas sensors based on metal oxides and acoustic-wave-based sensor devices. Here we combine several of these developments to fabricate a smart single-chip chemical microsensor system that incorporates three different transducers (mass-sensitive, capacitive and calorimetric), all of which rely on sensitive polymeric layers to detect airborne volatile organic compounds. Full integration of the microelectronic and micromechanical components on one chip permits control and monitoring of the sensor functions, and enables on-chip signal amplification and conditioning that notably improves the overall sensor performance. The circuitry also includes analog-to-digital converters, and an on-chip interface to transmit the data to off-chip recording units. We expect that our approach will provide a basis for the further development and optimization of gas microsystems.

Cantilever biosensors for detection of viruses and bacteria

“…Кантилеверные сенсоры также могут быть объеди нены с другими типами сенсоров для проведе ния более полного анализа. В [2] кантилеверный резонансный сенсор был совмещен с емкостным и калориметрическим датчиками с целью созда ния газового сенсора для анализа содержащихся в воз д у хе ле т у чи х орга ни че с к и х со е д ине ний (рис.1). Полная интеграция микроэлектрон ных и микромеханических компонентов на одном чипе обеспечивает управление и мониторинг функций датчика, а также повышает его общую производительность благодаря усилению сиг нала.…”

“…Cantilever sensors can also be combined with other types of sensors for more com plete analysis. In [2] cantilever reso nant sensor has been combined with capacitive and calorimetric sensors with the aim of creating a gas sen sor for the analysis of airborne vola tile organic compounds (Fig.1). Full integration of microelectronic and micromechanical components on the same chip provides control and monitoring of sensor functions, but also increases its overall perfor mance because of signal gain.…”

“…Fig.1. Micrograph of the chip of gas microsensor (size of 7×7 mm) [2] Рис.2. Имплантируемый кантилеверный сенсор для анали-за газов крови [4] Fig.2.…”

Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

“…However, these previously reported results were generally obtained in laboratories, with an off-sensor optical position sensing detection (PSD) of AFM mode used [11,12]. For portable bio/chemical sensing applications, there is a recent trend to integrate the sensing and actuating elements into the cantilever for onchip dynamic detection [6,13,14].…”

Design optimization of piezoresistive cantilevers for force sensing in air and water

“…5,6 Electronic sensing scales well to large arrays, 7 high frequencies, 8 and situations where optics are inconvenient. 9 With proper design, the resolution of piezoresistive cantilevers is comparable to optical detection. 5 However, the design methods used to date 10 are often misapplied in practice and are not readily generalizable to situations beyond epitaxial silicon piezoresistors in air.…”