Smart Sensing for Intelligent Machinery: Part I - Highly Sensitive Flow Sensor with A Flexible Hinge and A Double-deck Annular Capacitor Array

Cao, Haibo; Gu, Yue; Li, Xiaodong; Wang, Dong F.; Itoh, Toshihiro; Maeda, Ryutaro

doi:10.1109/dtip56576.2022.9911732

2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) 2022

DOI: 10.1109/dtip56576.2022.9911732

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Smart Sensing for Intelligent Machinery: Part I - Highly Sensitive Flow Sensor with A Flexible Hinge and A Double-deck Annular Capacitor Array

Haibo Cao

Yue Gu

Xiaodong Li

et al.

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Smart Sensing for Intelligent Machinery: Part I - Highly Sensitive Flow Sensor with A Flexible Hinge and A Double-deck Annular Capacitor Array

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