Small-Spot X-Ray Emission Spectroscopy and its Application for Study of Electronic Structure and Chemical Bonding in Solids

Soft X‐ray emission electron microscopy: chemical state microscopy from interface and bulk

“…The fluorescence spectrum reflects the local partial electronic DOS in the VB and thus provides a clear chemical identification of the material in the electron beam focus. The spectra show no evidence of a silicide formation at the interface to the metal layers [2,12,13] in agreement with the given lithographic sample preparation, which did not include annealing steps. On the same basis, it is also possible to rule out that significant amounts of crystalline [14] or amorphous Si are present in the probing volume.…”

“…In principle, this is available through soft X-ray emission (SXE) spectroscopy, which provides fluorescence information with about 200 meV energy resolution and a high-performance electron gun. This has been attempted in the past, [2,3] but problems with either spatial or energy resolution were encountered. We have shown (SIA conference, Berlin 2003) that a combination of a modern SXE spectrometer with a medium energy, high spatial resolution electron gun is able to provide spatially resolved chemical state information for the light elements.…”

Electronic structure of FeSi

“…The Si L 2,3 (2p-3s3d transition) X-ray emission spectra of FeSi were taken from Ref. [19], and the Fe K β 5 (1s-4p transition) X-ray emission spectrum was reproduced from Ref. [20].…”

Electronic structure ofCuV2S4

“…The V The S L 2,3 x-ray-emission spectrum was studied with the help of small-spot ultrasoft x-ray-emission spectrometer with diffraction grating (Nϭ600 lines/mm; Rϭ2 m͒ and electron excitation. 27 S L 2,3 spectra were measured with an energy resolution of about 0.3 eV. The x-ray tube was operated at Vϭ5 keV, Iϭ130 nA.…”