2000
DOI: 10.1109/68.896335
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Small-size silicon-oxynitride AWG demultiplexer operating around 725 nm

Abstract: We present experimental results of very compact, high Delta-n, five-channel arrayed waveguide gratings (AWG's) with 5 nm-channel-spacing fabricated in the silicon-oxynitride material system. The on-chip insertion loss is about 5 dB and the crosstalk is -30 dB around 725 nm wavelength. the uniformity of the waveguide layers is better than + -1%

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Cited by 15 publications
(7 citation statements)
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“…[1][2][3][4][5][6][7] In order to take advantage of these properties on macroscopic scale and create multifunctional materials, inorganic particles must be incorporated into organic matrix. Polymer nanocomposites represent one of the classes of inorganic-organic composite materials in which * Authors to whom correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6][7] In order to take advantage of these properties on macroscopic scale and create multifunctional materials, inorganic particles must be incorporated into organic matrix. Polymer nanocomposites represent one of the classes of inorganic-organic composite materials in which * Authors to whom correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%
“…Some of these systems have been successfully used to perform absorbance-based measurements. 11,[24][25][26] However, the implementation of on chip microspectrometers for fluorescence based analysis is in its very early stages, as seen by the small number of publications. 21 Here, we report the development, for the first time, of a monolithic integrated arrayed waveguide grating (AWG) microspectrometer microfluidic platform capable of fluorescence spectroscopic analysis.…”
Section: Introductionmentioning
confidence: 99%
“…However, low refractive index contrast silica waveguide circuits require a large bend radius, usually ranging from millimeters to one centimeter [1]. The ability to shrink large-sized waveguide circuits to a smaller size while maintaining low bend-loss would overcome the major obstacle currently facing silica technology [2]. However, high refractive index contrast waveguide circuits have large coupling losses with single mode fibers.…”
Section: Introductionmentioning
confidence: 99%