Effect of particle size on atomistic structures of vapor deposited Au-atom clusters has been examined by electron microscopy with the following results: (a) Icosahedrons are first formed, and they grow by two types of face sharing of further icosahedrons. (b) The lattice constant decreases more than about 1% in transition from icosahedral structures to cuboctahedral ones, which are a fcc-type structure, when average size of atom clusters becomes larger than about È3 nm. (c) Embryo of the final fcc structure is formed when the size of atom clusters increases to about È8 nm, and the lattice constant considerably increases more than 2% in spite of the same fcc structure as cuboctahedral ones. After that, the lattice constant scarcely changes even when the particle size increases more than È20 nm.These facts are considered to be closely related to heterogeneous distribution of electric charge within atom clusters. Based on the results, relationships between electronic structures in the three stages and anomalous behavior of metal-atom clusters, consisting of both fcc-type and bcc-type elements, are discussed.