2000
DOI: 10.1063/1.372980
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Size distribution and electroluminescence of self-assembled Ge dots

Abstract: In this article we study the electroluminescence of p-i-n diode structures with Ge dots consisting of coherent three-dimensional small ͑pyramids͒ and larger ͑dome͒ islands. The Ge dots are formed through strain-induced islanding. The diode structures, including one layer with Ge dots, were deposited on Si mesas with variable areas in order to study the influence of limited area deposition on self-assembling. It was observed that the reduction of deposited area improves island uniformity. The combined analysis … Show more

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Cited by 58 publications
(35 citation statements)
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“…This value is higher than the external efficiency reported for the QD-based Ge/Si LEDs (g = 10 -6 for k = 1.4 lm, Ref. [44]). In Ref.…”
Section: (A)contrasting
confidence: 48%
“…This value is higher than the external efficiency reported for the QD-based Ge/Si LEDs (g = 10 -6 for k = 1.4 lm, Ref. [44]). In Ref.…”
Section: (A)contrasting
confidence: 48%
“…Atomic force microscopy (AFM) measurements show that this process delivers particle heights between 1.3 and 2.9 nm and a mean particle density of 460 ± 30 particles/µm 2 . 15) Selected wafers were implanted with carbon at a dose of 3×10 16 cm -2 and an energy of 30 keV. For carbon implanted Ge nanoparticles, samples show a lower modal height of 0.7 nm and a lower particle density of 64 ± 18 particles/µm 2 .…”
Section: Methodsmentioning
confidence: 99%
“…The SiGe islands have heights ranging from 20 to 50 nm 13) and the Ge dots have diameters ranging from 20 to 250 nm and heights ranging from 10 to 25 nm. 14) Then the wafers were implanted with carbon at a dose of 3×10 16 cm -2 and an energy of 30 keV. The wafers were cut into 5×7 mm pieces and dipped in buffered hydrofluoric acid (HF) solution to remove the native oxide.…”
Section: Methodsmentioning
confidence: 99%
“…(With permission of ASM International.) The circles and the crosses are taken from [14] and [15], respectively.…”
Section: Si/ge Heteroepitaxymentioning
confidence: 99%
“…[14][15][16] Additional research is driven by a search for pathways to ever smaller and faster electronic devices, as well as silicon integration technology.…”
Section: Introductionmentioning
confidence: 99%