Site-controlled InAs quantum dots regrown on nonlithographically patterned GaAs

Abstract

In this letter, a nonlithographic method for fabrication of high-quality site-controlled InAs quantum dots on GaAs is explored. The self-organized pores in nanochannel alumina (NCA) are used to define the nucleation sites of the site-controlled quantum dots. The pattern from the NCA is transferred to the GaAs substrate by electrochemical etching. The first layer of regrown InAs dots preferentially locate at the bottom of the etch pits on the GaAs substrate. Furthermore, cross-sectional transmission electron microscopy shows that when multiple layers of InAs dots are regrown, the dots will exhibit vertical alignment. To show the excellent optical quality of the regrown quantum dots, photoluminescence spectra are studied; room-temperature photo luminescence from the regrown dots is achieved.

Controlled growth of InP/In0.48Ga0.52P quantum dots on GaAs substrate

“…On the other hand, by changing the growth temperature, laterally ordered QDs can be obtained by producing undulating In 0.48 Ga 0.52 P substrate which can later be used as a template for the growth of QDs. In many applications it is essential to control the positions of the QDs; for example, ordered ensembles of QDs can improve laser performance [13,14] as well as open new possibilities in computing [15][16][17].…”

Ordered InAs QDs using prepatterned substrates by monolithically integrated porous alumina

“…In particular, self-ordered nano-channel alumina (NCA) mask fabricated by electrochemical anodization [11] of an aluminium film, has been previously demonstrated for fabrication of ordered 2D arrays of nanostructures [12][13][14][15][16].…”

Self-assembled chains of single layer InP/(In,Ga)P quantum dots on GaAs (001)

“…The Stranski-Krastanow growth mode is an attractive approach for the realization of QDs due to the simplicity in their growth and their good crystal quality. In many applications it is essential to control the positions of the QDs, for example, ordered ensembles of QDs can improve laser performance 1,2 as well as open new possibilities in computing. [3][4][5] Sophisticated techniques have been recently developed to obtain self-assembled highly ordered QD structures, see, e.g., Refs.…”