2009
DOI: 10.1109/tasc.2009.2017856
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SIS Mixer Fabrication for ALMA Band10

Abstract: Band10 of the Atacama Large Millimeter Array (ALMA) is a planned heterodyne receiver covering the frequency range 790 GHz-950 GHz. The waveguide mixers are superconductor insulator superconductor (SIS) Nb Al AlO Nb junctions integrated with NbTiN SiO 2 Al tuning circuits. Our junction definition process has been greatly simplified by introducing an inductively-coupled-plasma (ICP) etcher to the fabrication. The etching process, which employs a low-pressure CF 4 O 2 plasma, allows to remove the entire Nb Al AlO… Show more

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Cited by 17 publications
(12 citation statements)
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“…The two-junction tuning circuit is employed to compensate the junction capacitances [10]. The fabrication procedure is described elsewhere [11], [12]. In our design, 1.05-μm diameter junctions with a current density of 10 kA/cm 2 are assumed, which is achievable by our standard junction fabrication process.…”
Section: B Terahertz Sis Mixermentioning
confidence: 99%
“…The two-junction tuning circuit is employed to compensate the junction capacitances [10]. The fabrication procedure is described elsewhere [11], [12]. In our design, 1.05-μm diameter junctions with a current density of 10 kA/cm 2 are assumed, which is achievable by our standard junction fabrication process.…”
Section: B Terahertz Sis Mixermentioning
confidence: 99%
“…The fabrication procedure was described by Kroug et al. (2009). In our design, junctions of >1 μm diameter and with a current density ( J C ) of 10 kA/cm 2 were adopted, which is achievable using our standard junction fabrication process.…”
Section: Alma Band 10 Receiversmentioning
confidence: 99%
“…Nb/AlOx/Nb junctions and NbTiN/ SiO 2 /Al microstrip lines were fabricated on the quartz substrates, and a two-junction tuning circuit was employed to compensate the junction capacitances (Zmuidzinas et al, 1994). The fabrication procedure was described by Kroug et al (2009). In our design, junctions of >1 μm diameter and with a current density (J C ) of 10 kA/cm 2 were adopted, which is achievable using our standard junction fabrication process.…”
Section: Sis Mixer-chip Designmentioning
confidence: 99%
“…To eliminate or partly reduce the loss and dispersion originating from the Cooper-pair breaking, we may use superconducting films with higher gap voltage or normal metal films such as Al. For example, the ALMA band-10 (beyond 0.7 THz) SIS mixer combines Nb SIS junctions and an integrated NbTiN/SiO 2 /Al tuning circuit [13]. Superconducting thin-film microstrip lines are characterized by combining the classical transmission line theory and Mattis-Bardeen theory addressing the complex conductivity of superconducting films [14].…”
Section: Superconducting Sis Tunnel Junction Mixersmentioning
confidence: 99%