2021
DOI: 10.1590/1980-5373-mr-2021-0058
|View full text |Cite
|
Sign up to set email alerts
|

SiOxCyHz-TiO2 Nanocomposite Films Prepared by a Novel PECVD-Sputtering Process

Abstract: Recently, there has been growing interest in the incorporation of particles in plasma deposited thin films to creation of multifunctional surfaces. In this work a new hybrid methodology based on the plasma enhanced chemical vapor deposition (PECVD) of hexamethyldisiloxane combined to the reactive sputtering of TiO 2 is proposed for the preparation of SiO x C y H z -TiO 2 composite films. Specifically, the effect of the proportion of O 2 in the plasma environment on the morphology, chemical structure, elemental… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
1
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 28 publications
(35 reference statements)
0
1
0
Order By: Relevance
“…Superior properties like this can be used for obtaining advanced devices. The deposition of AZO can be performed using the sol-gel dip and spin coating, chemical vapor deposition, magnetron sputtering, spray pyrolysis technique, etc., with various doping elements [23][24][25][26]. As a result of its band energy being more than 3.37 eV, zinc oxide (ZnO) may be utilised in a wide variety of commercial products, including pigments, paints, rubber, glass, metals, and batteries [27][28][29][30][31][32].…”
Section: Introductionmentioning
confidence: 99%
“…Superior properties like this can be used for obtaining advanced devices. The deposition of AZO can be performed using the sol-gel dip and spin coating, chemical vapor deposition, magnetron sputtering, spray pyrolysis technique, etc., with various doping elements [23][24][25][26]. As a result of its band energy being more than 3.37 eV, zinc oxide (ZnO) may be utilised in a wide variety of commercial products, including pigments, paints, rubber, glass, metals, and batteries [27][28][29][30][31][32].…”
Section: Introductionmentioning
confidence: 99%
“…Due to economic values and high demand given by a broad range of applications of coating technologies, there has been a significant effort and energy put into the design and study of functional thin films and technologies 12 . Magnetron sputtering 13 , sol-gel spin coating 14 , atomic layer deposition 15 , chemical vapor deposition 16 , solgel dip coating 17 , and pulsed laser deposition 18 are just a few of the techniques that can be employed to develop coatings.…”
Section: Introductionmentioning
confidence: 99%