SiO adsorption on a p(2×2) reconstructed Si(100) surface

Vibrational spectroscopy of SiO on Si(111)

“…These bridges easily may have formed upon bonding of impinging SiO molecules to dangling bonds on the surface so that each silicon atom of the SiOSi bridge has three backbonds to Si atoms. This conclusion is fully corroborated by a very recent theoretical study on SiO adsorption on Si(100) 11. There it has turned out, that the formation of SiOSi bridges can proceed without energy barrier at various adsorption sites, different to oxygen adsorption.…”

“…For the two most probable adsorption geometries with SiOSi bridges on the Si surface, the calculated vibration frequencies are 842 and 860 cm −1 , respectively. The calculated d are 165 and 166 pm, respectively, for these two species 11.…”

“…In SiO condensation studies the formed bulk structure is a major topic, but also the onset of condensation at the interface to a certain substrate is important, since different kinds of interactions may affect bulk‐structure formation. While on MgO chemical interaction was theoretically excluded and bulk formation was predicted to proceed via clustering 10, on silicon the easy formation of SiOSi bridges is predicted 11. These SiOSi bridges should form easier via SiO adsorption than via O 2 chemisorption.…”

Evaporation and Condensation of SiO and SiO2 Studied by Infrared Spectroscopy

“…The low sticking of O 2 is related to the dissociation barrier for chemisorption, whereas for SiO molecules, reaction pathways without energetic barriers exist. 32 It should be mentioned that an additional experiment with SiO 2 evaporation on clean germanium (Ge(100)) as the substrate results in the same silicon oxide spectra as on silicon, which proves the independence of the condensed system (above 1 nm thickness) from the substrate material. Figure 2 shows reflectance spectra of condensed layers from evaporation of SiO and SiO 2 , respectively, up to a thickness corresponding to 12.5 nm SiO; the thickness grows by 2.1 nm between two adjacent spectra.…”