SiO
                  2
           film thickness metrology by x-ray photoelectron spectroscopy

Lu, Zhaoming; McCaffrey, J. P.; Brar, B.; Wilk, G. D.; Wallace, Robert M.; Feldman, L. C.; Tay, Sing-Pin

doi:10.1063/1.120438

Cited by 227 publications

(112 citation statements)

References 15 publications

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“…Precise thickness measurement of these 24 ultra thin films is very critical in the development of Si-based devices. Oxide thickness is commonly measured by ellipsometry [8] but as film thicknesses is scaled down to several atomic layers, surface analytical techniques such as XPS become applicable tools to quantify these films [9]. An XPS measurement offers the additional advantage of providing information such as surface contamination and chemical composition of the film.…”

Section: Introductionmentioning

confidence: 99%

Study of SiO2/Si Interface by Surface Techniques

Ghita¹,

Logofatu²,

Negrila³

et al. 2011

Crystalline Silicon - Properties and Uses

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Section: Introductionmentioning

confidence: 99%

Study of SiO2/Si Interface by Surface Techniques

Ghita¹,

Logofatu²,

Negrila³

et al. 2011

Crystalline Silicon - Properties and Uses

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“…The presence of Si, O and SiO2 is detected in the spectrum. By further analysis of the results, the oxide thickness was also calculated to be about 3 nm [33,104].…”

Section: X-ray Photoelectron Spectroscopy (Xps)mentioning

confidence: 99%

Addressability and GHz Operation in Flexible Electronics

Sani

2016

Linköping Studies in Science and Technology. Dissertations

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The first principle is that you must not fool yourself and you are the easiest person to fool. -Richard FeynmanThe discovery of conductive polymers in 1977 opened up a whole new path for flexible electronics. Conducting polymers and organic semiconductors are carbon rich compounds that are able to conduct charges while flexed and are compatible with low-cost and large-scale processes including printing and coating techniques. The conducting polymer has aided the rapidly expanding field of flexible electronics, leading to many new applications such as electronic skin, RFID tags, smart labels, flexible displays, implantable medical devices, and flexible sensors.However, there are several remaining challenges in the production and implementation of flexible electronic materials and devices. The conductivity of organic conductors and semiconductors is still orders of magnitude lower compared to their inorganic counterparts. In addition, non-flexible inorganic semiconductors still remain the materials of choice for high frequency applications; since the charge carrier mobility and thus operational speed of the organic materials are limited. Therefore, there remains a high demand to combine the high frequency operation of inorganic semiconductors with the flexible fabrication methods of organic systems for future electronics.In addition to the challenges in the choice of materials in flexible electronics, the upscaling of the flexible devices and implementing them in circuits can also be complicated. Lack of non-linearity is an issue that arises when flexible devices with linear behavior need to be incorporated in an array or matrix form. Non-linearity is important for applications such as displays and memory arrays, where the devices are arranged as matrix cells addressed by their row and column number. If the behavior of cells in the matrix is linear, addressing each cell affects the adjacent cells. Therefore, inducing non-linearity and, consequently, addressability in such linear devices is the first step before scaling up into matrix schemes.In this work, non-linear organic/inorganic hybrid devices are produced to overcome the limitations mentioned above and leverage the advantages of both organic and inorganic materials. Two novel methods are developed to incorporate non-flexible inorganic semiconductors into ultra-high frequency (UHF) flexible devices. In the first method, Si is ground into a powder with micrometer-sized particles and printed through standard screen printing. For the first time, allprinted flexible diodes operating in the GHz range are produced. The energy harvesting application of the printed diodes is demonstrated in a flexible circuit coupling an antenna and the display to the diode.A second and simpler room-temperature method based on lamination was later developed, which further improves device performance and operational frequency. Here, a flexible semiconducting composite film consisting of Si microparticles, glycerol, and nano-fibrillated cellulose is produced and used as the semiconduct...

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“…One of the frequently used methods of thin film thickness determination is the X-ray Rreflectivity (XRR) [6][7]. This is a non-destructive procedure, which enables to determine the film thickness with the angstrom resolution [6].…”

Section: Theory Concerning Measurement Of Nanolayer Thicknessmentioning

confidence: 99%

Measurement of Silver Nanolayer Absorption by the Body in an in Vivo Model of Inflammatory Gastrointestinal Diseases

Siczek¹,

Pawlak²,

Zatorski³

et al. 2016

Metrology and Measurement Systems

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Layers of silver particles are used in the studies on pathophysiology and treatment of diseases, both in pre-clinical and clinical conditions. Silver layers can be formed using different techniques and on different substrates. Deposition by magnetron sputtering on glass beads was used in this study. Silver absorption by the body was estimated by calculating the difference in thickness of the silver nanolayer deposited on a bead and measured before and after application of the bead in an animal model of gastrointestinal inflammation. Recommendations for the minimal thickness of silver nanolayer deposited on glass beads were worked out for further studies.Keywords: silver nanolayer, measurement of layer thickness, in vivo animal model.

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SiO 2 film thickness metrology by x-ray photoelectron spectroscopy

Cited by 227 publications

References 15 publications

Study of SiO2/Si Interface by Surface Techniques

Study of SiO2/Si Interface by Surface Techniques

Addressability and GHz Operation in Flexible Electronics

Measurement of Silver Nanolayer Absorption by the Body in an in Vivo Model of Inflammatory Gastrointestinal Diseases

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