Single-walled carbon nanotubes produced by plasma-enhanced chemical vapor deposition

Kato, Toshiaki; Jeong, Goo‐Hwan; Hirata, Takamichi; Hatakeyama, Rikizo; Tohji, Kazuyuki; Motomiya, Kenichi

doi:10.1016/j.cplett.2003.10.007

Cited by 123 publications

(62 citation statements)

References 14 publications

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“…[80,83,84] Some representative catalysts are 1-2-Å Fe films, [83,84] small Fe clusters with around 300 Fe atoms, [84] and sandwiched layer structures of Al 2 O 3 0.7 nm/Fe 0.5 nm/Al 2 O 3 5-70 nm. [80] Remote plasma configuration and low plasma power is adopted, [81][82][83][84] such as the diffused region from high-density capacitively coupled discharge, [81,82] the after-glow region of a low-density plasma, [83,84] or a point-arc microwave plasma. [79,80] A plasma power as low as 15 W was used by Min et al for SWCNT growth.…”

Section: Single-walled Carbon Nanptubes By Plasma-enhanced Chemical Vmentioning

confidence: 99%

Plasma‐Assisted Approaches in Inorganic Nanostructure Fabrication

et al. 2010

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Plasma is a unique medium for chemical reactions and materials preparations, which also finds its application in the current tide of nanostructure fabrication. Although plasma-assisted approaches have been long used in thin-film deposition and the top-down scheme of micro-/nanofabrication, fabrication of zero- and one-dimensional inorganic nanostructures through the bottom-up scheme is a relatively new focus of plasma application. In this article, recent plasma-assisted techniques in inorganic zero- and one-dimensional nanostructure fabrication are reviewed, which includes four categories of plasma-assisted approaches: plasma-enhanced chemical vapor deposition, thermal plasma sintering with liquid/solid feeding, thermal plasma evaporation and condensation, and plasma treatment of solids. The special effects and the advantages of plasmas on nanostructure fabrication are illustrated with examples, emphasizing on the understandings and ideas for controlling the growth, structure, and properties during plasma-assisted fabrications. This Review provides insight into the utilization of the special properties of plasmas in nanostructure fabrication.

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Section: Single-walled Carbon Nanptubes By Plasma-enhanced Chemical Vmentioning

confidence: 99%

Plasma‐Assisted Approaches in Inorganic Nanostructure Fabrication

et al. 2010

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“…Using the microwave plasma chemical vapor deposition method, MWNTs were grown at ~450 o C by Wilson and co-workers 13 . To the best of our knowledge, the lowest growth temperature for SWNTs is 550 C in CVD technique 14 . They used zeolites as a supporting template for the Fe/Co catalyst.…”

Section: Resultsmentioning

confidence: 99%

Preparation and characterization of catalyst mix Fe-Co/MgO for carbon nanotubes growth

Steplewska¹,

Jędrzejewski²,

Borowiak‐Palen³

2008

Polish Journal of Chemical Technology

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Fe-Co/MgO is one of the most common catalyst mix applied to carbon nanotubes (CNTs) growth in chemical vapor deposition process. Therefore, here we present detailed study on the preparation and characterization of Fe-Co/MgO. The precursors of Fe and Co are iron (II) acetate and cobalt acetates, correspondingly. The molar ratio of the catalyst mix is Fe:Co:MgO=1:1:100. Initially, thermogravimetric analysis (TGA) of the mixture was performed. TGA analysis of it indicated the stepwise mass losses which pointed out the crucial thermal conditions for the changes in the elemental composition, morphology, crystallographic structure and vibrational properties. In current state of the art the lowest growth temperature for singlewalled carbon nanotubes is 550 o C in CVD technique and here the characterization of the catalyst mix strongly suggest that this temperature can be decreased what would enhance the compatibility of CNT growth with current complementary metal-oxide-silicon (CMOS) technology for CNTs-based nanoelectronics. The morphology, crystallographic structure, elemental composition of the samples and its spectroscopic properties were performed via high resolution transmission electron microscopy (TEM), X-ray diffraction (XRD) and Infrared spectroscopy (IR), respectively.

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“…Due to the plentiful supply of carbon caused by the presence of reactive radicals and unsaturated hydrocarbons in plasma, ion damage, and probably also unsuitable catalyst preparation, many of the PECVD processes were not successful in the synthesis of SWNTs. However, it has been shown, in some recent publications, that the low-pressure PECVD process is capable of yielding SWNTs [25][26][27].…”

Section: Chemical Vapor Deposition Of Carbon Nanotubesmentioning

confidence: 99%

Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

Zajı́čková

Jašek

Eliáš

et al. 2010

Pure and Applied Chemistry

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Abstract:There are many different techniques for the synthesis of carbon nanotubes (CNTs), and plasma technologies experience a significant competitor in thermal chemical vapor deposition (CVD) processes. A particular process is, therefore, selected according to the specific requirements of an application, which clearly differ for the development of composites as compared to nanoelectronics, field emission, displays, sensors, and the like. This paper discusses the method for the synthesis of CNTs using an atmospheric-pressure microwave (MW) torch. It was successfully applied in the fast deposition of multiwalled nanotubes (MWNTs) on a substrate without the necessity of any vacuum or heating equipment. Dense straight-standing nanotubes were prepared on Si substrates with and also without barrier SiO x layer. Therefore, it was possible to produce CNTs directly on conductive Si and to use them as an electron-emitting electrode of the gas pressure sensor. The CNTs grown in MW torch were also used to create a gas sensor based on the changes of electrical resistance measured between two planar electrodes connected by the CNTs.

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Single-walled carbon nanotubes produced by plasma-enhanced chemical vapor deposition

Cited by 123 publications

References 14 publications

Plasma‐Assisted Approaches in Inorganic Nanostructure Fabrication

Plasma‐Assisted Approaches in Inorganic Nanostructure Fabrication

Preparation and characterization of catalyst mix Fe-Co/MgO for carbon nanotubes growth

Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

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