Single-Tube Color Imager Using Hydrogenated Amorphous Silicon

Abstract

Reactively sputtered hydrogenated amorphous silicon film is used as the photoconductive target of a vidicon type image pickup tube. It is indicated that hydrogen partial pressure in the discharge gas has to be 40% or more in order to attain suitable image pickup tube characteristics. Photo-electric properties and lag-characteristics are enormously improved by lightly doping boron into amorphous silicon film, and a blocking type target structure is effective for suppressing dark current of the pickup tube. Using doped amorphous silicon film with a color-filter-integrated face plate, a single-tube color imager is fabricated.