Single sided stereo angle silicon strip detector

Huhtinen, M.; Orava, R.; Pimiä, M.; Tuuva, T.; Ylostalo, J.; Österberg, K.; Eränen, Simo; Leinonen, Kari; Hietanen, I.; Turchetta, R.; Schaeffer, M.

doi:10.1109/23.256575

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Cited by 3 publications

(1 citation statement)

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“…Some of the results are described in Ref. [7]. In each pair, the first line is as exposed and the second is the pattern reproduced with a 0.4 mm resolution.…”

Section: Discussionmentioning

confidence: 99%

Patterning large-area devices with a 5:1 reduction stepper

Leinonen

2005

Nuclear Instruments and Methods in Physics Research Section A:

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“…Some of the results are described in Ref. [7]. In each pair, the first line is as exposed and the second is the pattern reproduced with a 0.4 mm resolution.…”

Section: Discussionmentioning

confidence: 99%

Patterning large-area devices with a 5:1 reduction stepper

Leinonen

2005

Nuclear Instruments and Methods in Physics Research Section A:

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Silicon beam telescope for CMS detector tests

Eklund

Heikkinen

Honkanen

et al. 1999

Nuclear Instruments and Methods in Physics Research Section A:

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Semiconductor particle tracking detectors

Hall

1994

Rep. Prog. Phys.

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The last decade has seen substantial progress in the use of solid state detectors, which are now exploited on a large scale in high energy physics experiments for precise positional measurements. This article surveys the major classes of detector and the methods employed to construct them and instrument the large systems presently in use for particle tracking. Some of the most topical areas of current research and an indication of future important applications are described.

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Single sided stereo angle silicon strip detector

Cited by 3 publications

References 11 publications

Patterning large-area devices with a 5:1 reduction stepper

Patterning large-area devices with a 5:1 reduction stepper

Silicon beam telescope for CMS detector tests

Semiconductor particle tracking detectors

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