Single-shot multilayer measurement by chromatic confocal coherence tomography

Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination

“…They derived a quantitative evaluation of these errors and a method was presented for minimizing the influence of these errors. In 2017, Boettcher T et al [18] proposed a new hybrid single-shot imaging scheme that combined chromatic confocal and interference technology, to simultaneously measure the thickness and refractive index for translucent materials. In 2018, Zhang K et al [19] established a thickness measurement model by adding an auxiliary reflector below the specimen.…”

“…As the slide moves along the yellow arrow in Figure 9, several groups of H i and H 0 values can be obtained; however, the differences in each group, which can be represented as H i -H 0 , are not equal. Considering Equation (18), it is known that the thickness of the slide is not only related to the difference between H i and H 0 , but also related to the initial parameters of the measurement system. Therefore, the axial position of the slide along the yellow arrow was fixed.…”

“…At this axial position, θ, a, and h0 were each measured first, and th was calculated through Equation (12), which was 19.1°. The other parameters in Equa (18) are listed in Table 3. Using the color conversion algorithm introduced in Section 2.2.4, the R, G, and formation of these 40 pieces of pictures were converted to H values, as listed in Table Based on the discussion in Sections 2.2.3 and 3.1.1, θ was determined as 39 • , and the value of k 1 is 12.14 expressed in Equation (18).…”

“…The other parameters in Equa (18) are listed in Table 3. Using the color conversion algorithm introduced in Section 2.2.4, the R, G, and formation of these 40 pieces of pictures were converted to H values, as listed in Table Based on the discussion in Sections 2.2.3 and 3.1.1, θ was determined as 39 • , and the value of k 1 is 12.14 expressed in Equation (18). Calculated with the data in Tables 4 and 5 with Equation ( 18), the thickness of Slide 1 was 998.82 µm.…”

“…Based on the discussion in Sections 2.2.3 and 3.1.1, θ was determined as 39° value of k1 is 12.14 expressed in Equation (18). Calculated with the data in Table with Equation (18), the thickness of Slide 1 was 998.82 μm. The calculation formu as follows:…”