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Conference on Lasers and Electro-Optics 2022
DOI: 10.1364/cleo_at.2022.am4i.8
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Single-pulse Laser Induced Buried Defects in Silicon Written by Ultrashort-pulse Laser at 2.1 um

Abstract: We report sub-wavelength micrometer-sized buried defects induced in silicon by single ultrashort laser pulses at 2.09 µm. We also report laser-induced depressed cladding waveguide and other 3D-structures, and demonstrate waveguiding.

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“…Ultrashort-pulsed mid-infrared laser from ATLA Lasers AS operating around 2.1 mm was used as a structuring tool. 68,69 Laser emission was focused on the cathode surface by 11 mm focal distance aspheric lens antireection coated at the laser operation wavelength. The movements of the cathode against the laser beam were carried out by the three-axis air-bearing translation stage, ensuring excellent positioning speed, precision, and repeatability.…”
Section: Laser Structuringmentioning
confidence: 99%
“…Ultrashort-pulsed mid-infrared laser from ATLA Lasers AS operating around 2.1 mm was used as a structuring tool. 68,69 Laser emission was focused on the cathode surface by 11 mm focal distance aspheric lens antireection coated at the laser operation wavelength. The movements of the cathode against the laser beam were carried out by the three-axis air-bearing translation stage, ensuring excellent positioning speed, precision, and repeatability.…”
Section: Laser Structuringmentioning
confidence: 99%