Single-photon light-emitting diodes based on preselected quantum dots using a deterministic lithography technique

Abstract

In the present study, we developed a fabrication process of an electrically driven single-photon LED based on InP QDs emitting in the red spectral range, the wavelength of interest coinciding with the high efficiency window of Si APDs. A deterministic lithography technique allowed for the pre-selection of a suitable QD, here exclusively operated under electrical carrier injection. The final device was characterized under micro-electroluminescence in direct current, as well as in pulsed excitation mode. In particular, under pulsed excitation of one device, single-photon emission of a spectral line, identified as an exciton, has been observed with g (2) raw (0) = 0.42 ± 0.02, where the non-zero g (2) -value is mainly caused by background contribution in the spectrum and re-excitation processes due to the electrical pulse length. The obtained results constitute an important step forward in the fabrication of electrically driven single-photon sources, where deterministic lithography techniques can be used to sensibly improve the device performances. In principle, the developed process can be extended to any desired emitter wavelength above 600 nm up to the telecom bands.

Nanoscale Positioning Approaches for Integrating Single Solid‐State Quantum Emitters with Photonic Nanostructures

“…[ 69 ] At the device level, electrically pumped quantum light sources are highly desirable in real applications, and deterministically fabricated single‐photon LEDs were recently demonstrated with in situ photolithography. [ 70 ] Eventually, electrically pumped coherent single‐photons may be achieved by resonantly exciting QDs with micro‐lasers on the same chip. To this end, the device yields will be appreciably improved with the deterministically fabricated devices.…”

Nanoscale positioning approaches for integrating single epitaxial quantum emitters with photonic nanostructures

“…The ability to precisely locate solid-state quantum emitters so that their position in photonic nanostructures is tightly controlled provides a powerful tool in fundamental research by controlling the strength of light-matter interactions, e.g., probing the local density of optical states of photonic nanostructures with embedded QDs [70]. At the device level, electrically pumped quantum light sources are highly desirable in real applications and deterministically fabricated single-photon LEDs were recently demonstrated with in situ photolithography [71]. Eventually, electrically pumped coherent single-photons may be achieved by resonantly exciting QDs with micro-lasers on the same chip.…”

Quantum Dot Single-Photon Emission Coupled into Single-Mode Fibers with 3D Printed Micro-Objectives

“…38. For these optimization measurements, high-precision low temperature deterministic lithography was used 43 marking the emitter for further room temperature fabrication. 35,44 Furthermore, a first characterization of the fiber in-coupling performances was carried out in a high stability cryostat where the position of the fiber with respect to the sample can be precisely controlled (see the showing the fabrication of the integrated fiber coupled single-photon source.…”

“…Details of the microlens design, its optimization, and its relationship to the achievable photoluminescence enhancement are given in the supplement. For these optimization measurements, high-precision low temperature deterministic lithography was used [41] marking the emitter for further room temperature fabrication [35,42]. Furthermore, a first characterization of the fiber in-coupling performances was carried out in a high stability cryostat where the position of the fiber with respect to the sample can be precisely controlled (see supplement).…”