Abstract:Single-photon ionization time-of-flight mass spectrometry (SPI-TOFMS) is used in situ to monitor desorbing species and surface reactions during molecular beam epitaxy (MBE) of GaAs. In this method, the 1064 nm fundamental output of a Nd:YAG laser is tripled twice to produce 118 nm (10.5 eV) photons. The pulsed light is passed in front of a growing substrate, giving gaseous scattered molecules sufficient energy to ionize, but not fragment, them. Ionized species are detected with time-of-flight mass spectrometry… Show more
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