Single-particle light-scattering measurements with a photodiode array

Bartholdi, Marty F.; Salzman, G.C.; Hiebert, R. D.; Seger, G.

doi:10.1364/ol.1.000223

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2013

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Cited by 11 publications

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“…This method needs no lens, which makes the optical system simple. [8][9][10][11][12][13] Like Blu-ray or digital versatile disc (DVD), 4,14,15) the method also uses convexes which can easily be made by stamping, and so is suitable for mass production.…”

Section: Introductionmentioning

confidence: 99%

Scatterometry of Slant Incidence to Isolated Scatterers for High-Density Memory

Hoshino

Yatagai

Itoh

2013

Jpn. J. Appl. Phys.

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The turning on and off of a convex scatterer can be used to store information in digital versatile disc (DVD) or Blu-ray technology. In addition, the distance between scatterers can be used as information, if it is precisely measured. Using a recently developed method, a single Fourier transformation of a diffraction pattern can be used to measure the distance between scatterers with high precision and without a lens. To enhance the precision for high-density memory, we examined a method to improve the resolution of measuring isolated convexes. We show by simulation of RCWA that slant incident light is useful for this purpose. We also show by experiment the validity of the method using gratings and the wing of a butterfly.

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