Single element 3-terminal pressure sensors: A new approach to pressure sensing and its comparison to the half bridge sensors

Gowrishetty, Usha; Walsh, Kevin M.; McNamara, Shamus; Roussel, Thomas J.; Aebersold, Julia

doi:10.1109/sensor.2009.5285930

Cited by 5 publications

(9 citation statements)

References 4 publications

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“…IoT sensors that perceive and collect information and circuits that readout these sensors with high precision are also becoming more important [2]. Resistive micro-electro-mechanical systems (MEMS) sensors that use a piezoresistive effect have various ways, such as strain gauges and pressure, acceleration, and force sensors [3][4][5][6][7]. The need for smaller, less expensive high-performance sensors has developed in a way that makes sensors and sensing elements smaller.…”

Section: Introductionmentioning

confidence: 99%

Fully Differential Chopper-Stabilized Multipath Current-Feedback Instrumentation Amplifier with R-2R DAC Offset Adjustment for Resistive Bridge Sensors

Kwon

Kim

et al. 2019

Applied Sciences

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A fully differential multipath current-feedback instrumentation amplifier (CFIA) for a resistive bridge sensor readout integrated circuit (IC) is proposed. To reduce the CFIA’s own offset and 1/f noise, a chopper stabilization technique is implemented. To attenuate the output ripple caused by chopper up-modulation, a ripple reduction loop (RRL) is employed. A multipath architecture is implemented to compensate for the notch in the chopping frequency band of the transfer function. To prevent performance degradation resulting from external offset, a 12-bit R-2R digital-to-analog converter (DAC) is employed. The proposed CFIA has an adjustable gain of 16–44 dB with 5-bit programmable resistors. The proposed resistive sensor readout IC is implemented in a 0.18 μm complementary metal-oxide-semiconductor (CMOS) process. The CFIA draws 169 μA currents from a 3.3 V supply. The simulated input-referred noise and noise efficiency factor (NEF) are 28.3 nV/√Hz and 14.2, respectively. The simulated common-mode rejection ratio (CMRR) is 162 dB, and the power supply rejection ratio (PSRR) is 112 dB.

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Section: Introductionmentioning

confidence: 99%

Fully Differential Chopper-Stabilized Multipath Current-Feedback Instrumentation Amplifier with R-2R DAC Offset Adjustment for Resistive Bridge Sensors

Kwon

Kim

et al. 2019

Applied Sciences

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“…Mikro-tip 2 pressure catheters and SMI 3 pressure catheters are a couple of commercially available 1 Fr pressure catheters. Several researchers have reported sensor designs for miniature catheter application by deploying different piezoresistors, membrane structures and signal conditioning circuits [15][16][17][18][19][20]. For instance, Patil et al [15] and Kalvesten et al [16] have reported polysilicon-based piezoresistive pressure sensors using quarter-active Wheatstone bridge (QWB) and half-active Wheatstone bridge (HWB) readout circuits, respectively, for 1 Fr catheter application.…”

Section: Introductionmentioning

confidence: 99%

“…For instance, Patil et al [15] and Kalvesten et al [16] have reported polysilicon-based piezoresistive pressure sensors using quarter-active Wheatstone bridge (QWB) and half-active Wheatstone bridge (HWB) readout circuits, respectively, for 1 Fr catheter application. For less than 1 Fr catheter application, Melvas et al [17] and Usha et al [18] have reported piezoresistive pressure sensors using polysilicon and p-type single-crystal silicon materials, respectively, using HWB circuit. In the device reported by Melvas et al [17], complex structures such as leverage beams were used to improve the performance of miniature pressure sensors; however, this increased the fabrication cost with more process steps and decreased the yield.…”

Section: Introductionmentioning

confidence: 99%

“…The research concluded that the voltage sensitivity of a four-terminal piezoresistor is twice that of a three-terminal piezoresistor. A threeterminal piezoresistor was used by Usha et al [18] to develop a miniature pressure sensor for similar application. Recently, a high-performance SEP was designed by Coraucci et al [25] by increasing the number of input terminals of a four-terminal SEP as a multiterminal piezoresistor.…”

Section: Introductionmentioning

confidence: 99%

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Design and optimization of a three-terminal piezoresistive pressure sensor for catheter based in vivo biomedical applications

Meena

Mathew

Sankar

2017

Biomed. Phys. Eng. Express

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In recent times, catheters with integrated transducers have been extensively investigated in the field of biomedical engineering, especially for use in in vivo neonatal intensive care systems. An integral module of such systems is a blood pressure sensor that must fulfill the competing requirements of high sensitivity and small area. Typically, microelectromechanical systems-based membrane structures with integrated piezoresistors are used to realize such miniaturized blood pressure sensors. Conventionally, the electromechanical transduction of membrane deformation into an equivalent electrical signal is accomplished by piezoresistors connected in a fully active Wheatstone bridge configuration. However, such a configuration requires a large area for the placement of piezoresistors and layout of interconnects. Even though piezoresistors connected in a half-active Wheatstone bridge configuration overcome the area constraint, such an arrangement still suffers from reduced electrical sensitivity. In this paper we propose a novel three-terminal single-element piezoresistor membranebased miniaturized blood pressure sensor for less than 1 French catheter application. Design and optimization of the sensor is performed using numerical simulations to satisfy the competing requirements of high sensitivity, low structural non-linearity and high mechanical stability. Simulations are carried out to optimize the piezoresistor position, piezoresistor doping concentration and relative dimensions of the piezoresistor and the membrane. Results depict that sensor with a die size of 175 × 150 × 50 μm 3 results in an electrical sensitivity of 14.03 μA A -1 mmHg -1 . Finally, a set of design guidelines are outlined for optimizing the performance of three-terminal piezoresistor-based blood pressure sensors.

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“…Currently mechanical sensors based on piezoresistive [3], capacitive [4], resonant [5], and optical fiber [6,7] sensing modes were created to convert strain/stress changes to an electrical signal. Such types of sensors are widely used in aerospace, marine exploration, medical diagnostics, and biochemical fields [8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Strain gauge using Si-based optical microring resonator

et al. 2014

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This paper presents a strain gauge using the mechanical-optical coupling method. The Si-based optical microring resonator was employed as the sensing element, which was embedded on the microcantilevers. The experimental results show that applying external strain triggers a clear redshift of the output resonant spectrum of the structure. The sensitivity of 93.72 pm/MPa was achieved, which also was verified using theoretical simulations. This paper provides what we believe is a new method to develop micro-opto-electromechanical system (MOEMS) sensors.

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Single element 3-terminal pressure sensors: A new approach to pressure sensing and its comparison to the half bridge sensors

Cited by 5 publications

References 4 publications

Fully Differential Chopper-Stabilized Multipath Current-Feedback Instrumentation Amplifier with R-2R DAC Offset Adjustment for Resistive Bridge Sensors

Fully Differential Chopper-Stabilized Multipath Current-Feedback Instrumentation Amplifier with R-2R DAC Offset Adjustment for Resistive Bridge Sensors

Design and optimization of a three-terminal piezoresistive pressure sensor for catheter based in vivo biomedical applications

Strain gauge using Si-based optical microring resonator

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