Single crystal silicon micro mirrors

Schenk, Harald; Sandner, Thilo; Drabe, Christian; Klose, Thomas; Conrad, Holger

doi:10.1002/pssc.200880714

Cited by 27 publications

(42 citation statements)

References 8 publications

(9 reference statements)

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“…Now, we extend the MEMS based LIDAR to the novel concept of an adaptive 3D ToF laser camera with foveation properties [4] to allow e.g. future autonomous robots to better interact with their surroundings.…”

Section: Concept Of An Adaptive 3d Tof Laser Cameramentioning

confidence: 99%

Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

et al. 2014

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This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600 Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effective 5 mm a synchronized driven MEMS scanner array-consisting of five hybrid assembled MEMS devices-are used in a novel 3D ToF laser scanner enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 3...5 mm at 7.5 m measuring range for a gray target

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Section: Concept Of An Adaptive 3d Tof Laser Cameramentioning

confidence: 99%

Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

et al. 2014

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“…• guarantee a low beam divergence of 1mrad and minimization of dynamic mirror deformation of sending mirror Both scanning mirror designs were based on the electrostatic resonant driving principle of Fraunhofer IPMS [7]. For MEMS fabrication BSOI-substrates with a 75µm thick device (SOI) layer were used.…”

Section: Mems Design and Fabricationmentioning

confidence: 99%

Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera

et al. 2015

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This paper presents a large aperture micro scanning mirror (MSM) array especially developed for the novel 3D-laser camera Fovea3D. This 3D-camera uses a pulsed ToF technique with 1MVoxel distance measuring rate and targets for a large measurement range of 30 ... 100m and FOV of 120 degrees x60 degrees at video like frame rates. To guarantee a large reception aperture of >= 20mm, large FOV and 3200 Hz bi-directional scanning frequency at the same time, a hybrid assembled MSM array was developed consisting of 22 reception mirrors and a separate sending mirror. A hybrid assembly of frequency selected scanner elements and a driving in parametric resonance were chosen to enable a fully synchronized operation of all scanner elements. For position feedback piezo-resistive position sensors are integrated on each MEMS chip. The paper discusses details of the MEMS system integration including the synchronized operation of multiple scanning elements

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“…laser projection, endoscopic laser cameras, bar code readers etc.) [11]. These 1D/2D scanners are fabricated from single crystalline silicon in a qualified fully CMOS compatible fabrication process suitable for mass fabrication [10] resulting in highly robust and reliable MEMS devices withstand easily a shock acceleration of more than 2500g.…”

Section: Resonate Micro Scanning Mirrors With Vertical In-plane Comb mentioning

confidence: 99%

Synchronized microscanner array for large aperture receiver optics of LIDAR systems

et al. 2010

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Traditional laser scanners for 3D distance measurement involve expensive, heavy, (potentially) slow rotating mirrors for light deflection of the scanning TOF (time of flight) distance measurement, not suitable for compact, robust and highly portable LIDAR system. On the other hand MEMS scanners are limited to small apertures not suitable for a precise TOF measurement. To overcome this problem Fraunhofer IPMS presents a large aperture 1D-MEMS scanner array especially designed for LIDAR applications. It is composed of 2 x 7 silicon mirror elements each having an identical design with comparatively large aperture of 2.51 x 9.51mm² and ±30° optical scan range. All mirrors are driven electrostatically resonant with identical frequency close to design frequency of 250 Hz. By driving control all single scanner elements are synchronized to identical phase and amplitude in respect to a master scanner. This results in a large effective scanner aperture of 334 mm² for the receiver optics and a filling factor of 80 %. To guarantee the synchronized operation the paper discusses in detail the scanner design to enable a sufficiently large frequency bandwidth of all scanner elements to the compensate frequency tolerances caused by fabrication and packaging. In comparison to LIDAR systems with conventional scanner components, the large aperture 1D-MEMS scanner array enables 3D-LIDAR systems to become significantly smaller, more robust and (potentially) less expensive, also higher scan rates can be realized without additional efforts (e.g. no air bearings are needed)

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Single crystal silicon micro mirrors

Cited by 27 publications

References 8 publications

Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

Quasi-static microscanner with linearized scanning for an adaptive 3D laser camera

Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera

Synchronized microscanner array for large aperture receiver optics of LIDAR systems

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