Single-Crystal Lithium Niobate Films by Crystal Ion Slicing

Levy, M.; Radojevic, Antonije M.

doi:10.1007/978-3-662-10827-7_12

Cited by 5 publications

(1 citation statement)

References 60 publications

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“…The development and refinement of the "Smart Cut" technology [53], commonly used to generate SOI wafers, has emerged as a the standard technique for producing high-quality LN thin films [35,54]. The use of crystal ion slicing to prepare thin-film LN started in late 1990s [8] and early 2000s [10], including a patent that was filed in 1998 and expired in 2018 [9].…”

Section: Thin-film Lithium Niobatementioning

confidence: 99%

Integrated photonics on thin-film lithium niobate

et al. 2021

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Lithium niobate (LN), an outstanding and versatile material, has influenced our daily life for decades: from enabling high-speed optical communications that form the backbone of the Internet to realizing radio-frequency filtering used in our cell phones. This half-century-old material is currently embracing a revolution in thin-film LN integrated photonics. The success of manufacturing wafer-scale, high-quality, thin films of LN on insulator (LNOI), accompanied with breakthroughs in nanofabrication techniques, have made high-performance integrated nanophotonic components possible. With rapid development in the past few years, some of these thin-film LN devices, such as optical modulators and nonlinear wavelength converters, have already outperformed their legacy counterparts realized in bulk LN crystals. Furthermore, the nanophotonic integration enabled ultra-low-loss resonators in LN, which unlocked many novel applications such as optical frequency combs and quantum transducers. In this Review, we cover-from basic principles to the state of the art-the diverse aspects of integrated thinfilm LN photonics, including the materials, basic passive components, and various active devices based on electro-optics, all-optical nonlinearities, and acousto-optics. We also identify challenges that this platform is currently facing and point out future opportunities. The field of integrated LNOI photonics is advancing rapidly and poised to make critical impacts on a broad range of applications in communication, signal processing, and quantum information.

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Section: Thin-film Lithium Niobatementioning

confidence: 99%

Integrated photonics on thin-film lithium niobate

et al. 2021

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Fabrication of ion‐sliced lithium niobate slabs using helium ion implantation and Cu–Sn bonding

Xiang

Guan

Yang

et al. 2014

Physica Status Solidi (a)

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The fabrication of LiNbO 3 waveguide slabs with sub-micron thickness is presented using He ion-induced splitting and the Cu-Sn bonding technique. The exfoliation time of implanted LiNbO 3 was investigated as a function of annealing temperatures to reveal the activation energies during the splitting process. Defect-free waveguide films with large areas of several cm 2 are consistently produced by using the inter-diffusion bonding of Cu-Sn interface. The fabricated film was investigated by using the Rutherford backscattering/channeling method and dark mode spectroscopy.

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Materials, Fabrication and Characterization Methods

Rabus

Sada²

2020

Springer Series in Optical Sciences

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Single-Crystal Lithium Niobate Films by Crystal Ion Slicing

Cited by 5 publications

References 60 publications

Integrated photonics on thin-film lithium niobate

Integrated photonics on thin-film lithium niobate

Fabrication of ion‐sliced lithium niobate slabs using helium ion implantation and Cu–Sn bonding

Materials, Fabrication and Characterization Methods

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