Single-crystal diamond pyramids: synthesis and application for atomic force microscopy

Tuyakova, Feruza T.; Obraztsova, Ekaterina A.; Исмагилов, Р. Р.

doi:10.1117/1.jnp.10.012517

Cited by 15 publications

(6 citation statements)

References 21 publications

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“…In particular, selective oxidation of this bi-phase diamond material allows mass production of single crystal diamond crystallites with the geometrically perfect shape of rectangular pyramids [5]. Perfect suitability of these diamond needles for application as atomic force microscopy (AFM) probes was demonstrated in [6,7]. The manufacturing protocols, originaly developed in [5][6][7], were reproduced for commercial production of the AFM diamond probes and indenters [8], and for manipulations with wettability of surface [9].…”

Section: Introductionmentioning

confidence: 99%

Structural peculiarities of single crystal diamond needles of nanometer thickness

et al. 2016

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Diamond is attractive for various applications due to its unique mechanical and optical properties. In particular, single crystal diamond needles with high aspect ratios and sharp apexes of nanometer size are demanded for different types of optical sensors including optically sensing tip probes for scanning microscopy. This paper reports on electron microscopy and Raman spectroscopy characterization of the diamond needles having geometrically perfect pyramidal shapes with rectangular atomically flat bases with (001) crystallography orientation, 2-200 nm sharp apexes, and with lengths from about 10-160 μm. The needles were produced by selective oxidation of (001) textured polycrystalline diamond films grown by chemical vapor deposition. Here we study the types and distribution of defects inside and on the surface of the single crystal diamond needles. We show that sp3 type point defects are incorporated into the volume of the diamond crystal during growth, while the surface of the lateral facets is enriched by multiple extended defects. Nitrogen addition to the reaction mixture results in increase of the growth rate on {001} facets correlated with the rise in the concentration of sp3 type defects.

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Section: Introductionmentioning

confidence: 99%

Structural peculiarities of single crystal diamond needles of nanometer thickness

et al. 2016

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“…The presence of other carbon species in the film was also indicated by the Raman spectrum as the broad bands centered at 1133 cm −1 and 1470 cm −1 for the nanodiamonds and 1350 cm −1 and 1547 cm −1 for the graphitic fraction [ 25 , 26 , 27 ]. The graphitic and nanodiamond materials were located between the microdiamond grains, as in the case of their deposition using plasma-enhanced CVD [ 28 ]. As seen in Figure 3 , the thermal oxidation for 22 h in air at 580 °C was suitable for the selective removal of nondiamond phases from the thin polycrystalline film.…”

Section: Resultsmentioning

confidence: 99%

Single-Crystal Diamond Needle Fabrication Using Hot-Filament Chemical Vapor Deposition

et al. 2021

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Single-crystal diamonds in the form of micrometer-scale pyramids were produced using a combination of hot-filament (HF) chemical vapor deposition (CVD) and thermal oxidation processes. The diamond pyramids were compared here with similar ones that were manufactured using plasma-enhanced (PE) CVD. The similarities revealed in the morphology, Raman, and photoluminescent characteristics of the needles obtained using the hot-filament and plasma-enhanced CVD are discussed in connection with the diamond film growth mechanism. This work demonstrated that the HF CVD method has convincing potential for the fabrication of single-crystal diamond needles in the form of regularly shaped pyramids on a large surface area, even on non-conducting substrates. The experimental results demonstrated the ability for the mass production of the single-crystal needle-like diamonds, which is important for their practical application.

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“…SCD resonators allow to achieve high performance in force sensing, [95][96][97] mass sensing, [66,98] gas sensing, [99,100] pressure sensing, [53] smart electrical switch, [14] and optomechanical systems coupling the optical mode with mechanical modes. [101,102] The NEMS switch has emerged as a prospective alternative to the CMOS technology.…”

Section: Single-crystalline Diamond-based Mems Devicesmentioning

confidence: 99%

Diamond MEMS: From Classical to Quantum

Sun,

Zhang,

Liu

et al. 2023

Adv Quantum Tech

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Diamond has numerous outstanding properties in mechanics, physics, chemistry, electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical systems (MEMS/NEMS) devices or hybrid quantum MEMS/NEMS systems. The extremely high mechanical strength and the ultra‐wide bandgap energy enable the development of mechanically and thermally robust MEMS/NEMS sensors and switches, while the long coherence time of spin defects center enables the reading out through optical methods, precise quantum sensing, and quantum information processing. In this paper, the development of diamond‐based MEMS/NEMS from the viewpoints of classic devices to quantum systems are reviewed. The fabrication process and the classic applications of diamond MEMS/NEMS devices are first described, including those from micro‐crystalline, nano‐crystalline/ultranano‐crystalline, and single‐crystalline diamonds. Then, the physical properties of nitrogen‐vacancy defect center, as well as the application referred to the hybrid system composed of MEMS structures and nitrogen‐vacancy centers embedded, strain–spin interaction, and diamond‐based optomechanics are introduced. Finally, a conclusion and outlook are presented. It is expected that diamond MEMS/NEMS is not only an ideal platform for high‐performance and high‐reliability advanced classic MEMS devices but also for quantum sensing, information, and exploring the fundamentals of quantum mechanics.

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Single-crystal diamond pyramids: synthesis and application for atomic force microscopy

Cited by 15 publications

References 21 publications

Structural peculiarities of single crystal diamond needles of nanometer thickness

Structural peculiarities of single crystal diamond needles of nanometer thickness

Single-Crystal Diamond Needle Fabrication Using Hot-Filament Chemical Vapor Deposition

Diamond MEMS: From Classical to Quantum

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