Single-collision scattering of keV-energy Kr ions off a polycrystalline Cu surface

Rai, Subam; Bijlsma, Klaas; Koeleman, S.; Tjepkema, Otte; Noordam, Apolonius; Jonkman, Harry T.; Versolato, Oscar; Hoekstra, Ronnie

doi:10.1016/j.nimb.2020.08.021

Cited by 2 publications

(1 citation statement)

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“…may limit the lifetime of the light collecting multilayer optics. Rai et al [100] studied single-collision scattering of keVenergy ions off surfaces to elucidate the absence of a singlescattering peak in the here relevant Sn-Ru collisions [101] and to test the predictive power of standard Monte Carlo binary collision codes such as SRIM (Stopping and Range of Ions in Matter) [102]. These codes, which were primarily developed for modeling swift particle interactions with solid state targets, are also used to simulate the stopping and mitigation of plasma ions in hydrogen buffer gas surrounding the plasma.…”

Section: Plasma Expansion-'fast Ionic' Debrismentioning

confidence: 99%

Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (Topical Review)

Versolato

Sheil

Witte

et al. 2022

J. Opt.

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Plasma produced from molten-tin microdroplets generates extreme ultraviolet light for state-of-the-art nanolithography. Currently, CO2 lasers are used to drive the plasma. In the future, solid-state mid-infrared lasers may instead be used to eﬃciently pump the plasma. Such laser systems have promise to be more compact, better scalable, and have higher wall-plug eﬃciency. In this Topical Review, we present recent ﬁndings at the Advanced Research Center for Nanolithography (ARCNL) on using 1- and 2-µm-wavelength solid-state lasers for tin target preparation and for driving hot and dense plasma. The ARCNL research ranges from advanced laser development, over studies of ﬂuid dynamic response of droplets to impact, radiation-hydrodynamics calculations of, e.g., ion “debris”, (EUV) spectroscopic studies of tin laser-produced-plasma, to high-conversion eﬃciency operation of 2-µm-wavelength driven plasma.

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Section: Plasma Expansion-'fast Ionic' Debrismentioning

confidence: 99%