Single Chip Gas Sensor Array for Air Quality Monitoring

Prajapati, Chandra Shekhar; Soman, Rohith; Rudraswamy, S B; Nayak, M. M.; Bhat, Navakanta

doi:10.1109/jmems.2017.2657788

Cited by 67 publications

(39 citation statements)

References 19 publications

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“…Finally, backside etching of bulk Si is performed using deep reactive ion etching process to get a low thermal mass for driving the microheaters. More details about sensor fabrication optimizations are described elsewhere . The fabricated sensor chip of 1 × 1 mm size is packaged on Kovar header by using wire wedge bonding process to characterize the sensor device.…”

Section: Resultsmentioning

confidence: 99%

Highly Sensitive CO Sensor Based on Thickness‐Selective ZnO Thin Film: Device Fabrication and Packaging

Prajapati

Bhat

2019

Crystal Research and Technology

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In this report, the thickness‐dependent carbon monooxide (CO)‐sensing characteristics of sputtered zinc oxide (ZnO) films are investigated, followed by their morphological and electrical characterizations. ZnO films, ≈21 nm, show repeatable and high change in their resistances on exposure to CO and the observed maximum response is ≈52.2%, whereas ≈219 nm films fail to show reproducibility in sensing performance. Response and recovery time of ≈21 nm films are ≈28 and 250 s, which are faster than the time observed in case of ≈219 nm films. An ≈21 nm film is able to resolve 100 parts‐per‐billions (ppb) CO concentration in air. Later, on‐chip integration of ≈21 nm film is successfully implemented on specifically designed Micro‐Electro‐Mechanical‐System (MEMS) platform, inbuilt with microheater and utilizes power of ≈23.7 Milliwatts (mW) (375 °C). The packaged sensor chip is further tested and qualified for indoor and outdoor detection of CO gas in the atmosphere.

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Section: Resultsmentioning

confidence: 99%

Highly Sensitive CO Sensor Based on Thickness‐Selective ZnO Thin Film: Device Fabrication and Packaging

Prajapati

Bhat

2019

Crystal Research and Technology

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“…Compared to PCA results, the LDA presented more discrimination and decreased overlapping between classes and thus showed better performance. In previously studied metal-oxide based sensor arrays, the operating temperature range for detecting various gases was between 150 up to 500°C [15,[33][34][35], while the proposed technique enables the sensor array to discriminate several analytes at room temperature. Other photocatalyst metal-oxide gas sensors are also expected to fit the proposed technique.…”

Section: Experimental Gas Sensing Resultsmentioning

confidence: 99%

Gas sensor array assisted with UV illumination for discriminating several analytes at room temperature

Pour¹,

Nikfarjam

Taheri³

et al. 2019

Micro & Nano Letters

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In this work, a metal-oxide gas sensor array was fabricated for discriminating several gases at room temperature using ultraviolet (UV) illumination. The sensor array consisted of four interdigitated gold microelectrodes, and titanium dioxide (TiO 2) nanofibres were electrospun on them. The nanofibres were calcined at 550°C for 1 h. Finally, one of these sensors was coated with a thin layer of gold (Au) using DC sputtering method at a thickness of 2 nm. Similarly, the other two sensors were coated with a thin layer of platinum (Pt) and copper (Cu), respectively, and the last one remained uncoated. The nanofibres were characterised by scanning electron microscope, X-ray diffraction, and UV spectroscopy. The examined analytes were methanol, ethanol, NH 3, and acetone, each at seven various concentration levels, including 50, 100, 150, 200, 300, 400, and 500 ppm. Principal component analysis and linear discriminant analysis were used to evaluate the proposed technique. The results demonstrated that the sensor array along with UV illumination could successfully discriminate the analytes at room temperature.

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“…The developments of biomolecules and gas sensors have discovered wide applications in environmental monitoring, protection, industrial control, and indoor air quality control. [1][2][3][4] It is well known that different air toxins/pollutants released from industries, automobiles, and household appliances are responsible for global environmental issues, such as acid rain, global warming, and depletion of the ozone layer. [5,6] Today, carbon pollution gets all the attention for its role in climate change, but nitrogen pollution is an equally challenging problem.…”

Section: Introductionmentioning

confidence: 99%

First‐Principles Investigation of Antimonene Nanoribbons for Sensing Toxic NO₂ Gas

Srivastava

Abhishek

Sharma

et al. 2020

Physica Status Solidi (b)

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Herein, based on density functional theory (DFT) calculations, the antimonene nanoribbons (SbNRs) are systematically investigated to gauge their potential for plausible NO2 sensors. The outcomes suggest that the adsorbed NO2 molecule forms a strong chemical bond with zigzag SbNR (ZSbNR) and armchair SbNR (ASbNR). Also, it is unveiled that each configuration of NO2 adsorption on SbNR is energetically favorable, with O2NZSbNRH and O2NHASbNRHO2N considered as most stable adsorption configuration. NO2 molecule acts as a strong charge acceptor and exhibits reasonable adsorption energy. The electronic structure calculations reflect the transformation of narrow to wide bandgap semiconductors upon adsorption. The obtained transport properties feature the profound change in current magnitude in both ZSbNR and ASbNR after NO2 adsorption. Present findings indicate that ZSbNR and ASbNR are highly selective to detect the presence of NO2 molecules against atmospheric gases.

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Single Chip Gas Sensor Array for Air Quality Monitoring

Cited by 67 publications

References 19 publications

Highly Sensitive CO Sensor Based on Thickness‐Selective ZnO Thin Film: Device Fabrication and Packaging

Highly Sensitive CO Sensor Based on Thickness‐Selective ZnO Thin Film: Device Fabrication and Packaging

Gas sensor array assisted with UV illumination for discriminating several analytes at room temperature

First‐Principles Investigation of Antimonene Nanoribbons for Sensing Toxic NO₂ Gas

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Single Chip Gas Sensor Array for Air Quality Monitoring

Cited by 67 publications

References 19 publications

Highly Sensitive CO Sensor Based on Thickness‐Selective ZnO Thin Film: Device Fabrication and Packaging

Highly Sensitive CO Sensor Based on Thickness‐Selective ZnO Thin Film: Device Fabrication and Packaging

Gas sensor array assisted with UV illumination for discriminating several analytes at room temperature

First‐Principles Investigation of Antimonene Nanoribbons for Sensing Toxic NO2 Gas

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First‐Principles Investigation of Antimonene Nanoribbons for Sensing Toxic NO₂ Gas