Single- and Triaxis Piezoelectric-Bimorph Accelerometers

Zou, Qiang; Tan, Wei; Kim, Eun Sok; Loeb, Gerald E.

doi:10.1109/jmems.2007.909100

Cited by 77 publications

(18 citation statements)

References 19 publications

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“…Zou et al presented novel single and triaxis piezoelectric-bimorph accelerometers, which built on parylene beams with ZnO films. The unamplified sensitivities of the x -, y -, and z -axis were 0.93, 1.13, and 0.88 mV/g and the cross-axial sensitivity was less than 15% [32]. Nagano et al reported a piezoelectric tunable capacitor based on double-layered AlN thin films.…”

Section: Introductionmentioning

confidence: 99%

“…In our previous work, we designed a ZnO acceleration sensor based on a single piezoelectric layer cantilever structure by doping Li atoms as impurities to increase the resistivity of the ZnO thin film, thereby enhancing its piezoelectric characteristics. The sensitivity could reach 29.48 mV/g [29], based on the above reports [32,33,34]. In order to improve the voltage sensitivity of the acceleration sensor, a series structure double piezoelectric layer acceleration sensor based on the piezoelectric effect of the Li-doped ZnO thin film was designed, fabricated, and analyzed in this study.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

Zhao

et al. 2019

Micromachines

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In this paper, a double piezoelectric layer acceleration sensor based on Li-doped ZnO (LZO) thin film is presented. It is constituted by Pt/LZO/Pt/LZO/Pt/Ti functional layers and a Si cantilever beam with a proof mass. The LZO thin films were prepared by radio frequency (RF) magnetron sputtering. The composition, chemical structure, surface morphology, and thickness of the LZO thin film were analyzed. In order to study the effect of double piezoelectric layers on the sensitivity of the acceleration sensor, we designed two structural models (single and double piezoelectric layers) and fabricated them by using micro-electro-mechanical system (MEMS) technology. The test results show that the resonance frequency of the acceleration sensor was 1363 Hz. The sensitivity of the double piezoelectric layer was 33.1 mV/g, which is higher than the 26.1 mV/g of single piezoelectric layer sensitivity, both at a resonance frequency of 1363 Hz.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

Zhao

et al. 2019

Micromachines

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“…Due to their excellent electromechanical coupling, fast response and design flexibility, piezoelectric ceramics have been regarded as promising materials for constructing various devices in micromechanical systems (MEMS), such as ultrasonic micromotors [1], actuators [2], micropumps and microvalves [3,4] and accelerometers [5], etc . Among these, piezoelectric bimorph and multimorph are commonly employed as fundamental elements to complement the functions of different devices.…”

Section: Introductionmentioning

confidence: 99%

Thermo-Electro-Mechanical Analysis of a Curved Functionally Graded Piezoelectric Actuator with Sandwich Structure

2011

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In this work, the problem of a curved functionally graded piezoelectric (FGP) actuator with sandwich structure under electrical and thermal loads is investigated. The middle layer in the sandwich structure is functionally graded with the piezoelectric coefficient g31 varying continuously along the radial direction of the curved actuator. Based on the theory of linear piezoelectricity, analytical solutions are obtained by using Airy stress function to examine the effects of material gradient and heat conduction on the performance of the curved actuator. It is found that the material gradient and thermal load have significant influence on the electroelastic fields and the mechanical response of the curved FGP actuator. Without the sacrifice of actuation deflection, smaller internal stresses are generated by using the sandwich actuator with functionally graded piezoelectric layer instead of the conventional bimorph actuator. This work is very helpful for the design and application of curved piezoelectric actuators under thermal environment.

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“…6 We anticipate that such functional electrical stimulation will benefit eventually from closed-loop feedback from sensors incorporated into these implants, 15 including multiaxial accelerometers whose axial orientation is important for their function. 18,19 In order to inject these devices in a simple yet highly accurate manner, we have designed, built and tested the BION Insertion Tool (BIT) described herein, which is now in clinical use ( Figs. 1 and 2).…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of an Injection Tool for Neuromuscular Microstimulators

Kaplan

Loeb

2009

Ann Biomed Eng

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The injection of small implants into precisely localized sites within the body is a difficult task usually undertaken by surgeons or interventive radiologists. We have designed, produced and tested a simple tool for implanting BION wireless microstimulators as an outpatient office procedure. The ability of BIONs to elicit a desired muscle contraction depends on their placement near the motor fibers that innervate the muscle fibers, providing both the requirement and a means for achieving accurate placement. The implant is preloaded into the tip of the cannula of a two-piece insertion tool made from non-conductive polymers. Trial stimulation pulses are generated by the implant as the tool is manipulated into the desired position. The implant is released by withdrawing the cannula over the implant, preserving both the relative location of the implant's electrodes with respect to the target and determining its desired axial orientation, which is important for implants containing motion sensors. The BION Insertion Tool has been used for over 30 BION implants in human subjects to date.

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Single- and Triaxis Piezoelectric-Bimorph Accelerometers

Cited by 77 publications

References 19 publications

Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

Thermo-Electro-Mechanical Analysis of a Curved Functionally Graded Piezoelectric Actuator with Sandwich Structure

Design and Fabrication of an Injection Tool for Neuromuscular Microstimulators

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