SiN integrated optical phased arrays for two-dimensional beam steering at a single near-infrared wavelength

Tyler, Nicola A.; Fowler, Daivid; Malhouitre, Stéphane; Garcia, Stephanie; Grosse, Philippe; Rabaud, W.; Szelag, Bertrand

doi:10.1364/oe.27.005851

Cited by 104 publications

(45 citation statements)

References 15 publications

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“…An OPA using SiN waveguides faces a more severe power management issue because of poorer thermo-optic phase tuning efficiency. The required power is about an order of magnitude higher [71], i.e., tens of watts, and it may demand active cooling which draws even more power from the system. It effectively makes the solution unattractive or even inapplicable given most other LiDAR products consume 10-20 W. The authors believe that if a SiN OPA is used for its benefit in transparency of 800-1000 nm wavelength range, certain performance may need to be traded off in order to simplify the power management.…”

Section: Phase Shiftermentioning

confidence: 99%

Si Photonics for Practical LiDAR Solutions

et al. 2019

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In the article the authors discuss light detection and ranging (LiDAR) for automotive applications and the potential roles Si photonics can play in practice. The authors review published research work on Si photonics optical phased array (OPA) and other relevant devices in the past decade with in-depth technical analysis with respect to practical system design considerations. The commercialization status of certain LiDAR technologies is briefly introduced.

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Section: Phase Shiftermentioning

confidence: 99%

Si Photonics for Practical LiDAR Solutions

et al. 2019

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“…To demonstrate the use of this platform for LIDAR applications, we used these building blocks to design an optical circuit comprising four small OPA circuits linked to a single optical input via a switching network, with which we demonstrated rudimentary two-dimensional beam steering at a fixed wavelength of λ = 905 nm (see Figure 6) [51]. In conclusion, these results [32] show that it is possible to generate a wideband comb at telecom wavelengths using annealing-free silicon nitride nonlinear circuits featuring a full FEOL process compatibility with Si photonics.…”

Section: Sin For Near Infrared Lidarmentioning

confidence: 99%

“…To demonstrate the use of this platform for LIDAR applications, we used these building blocks to design an optical circuit comprising four small OPA circuits linked to a single optical input via a switching network, with which we demonstrated rudimentary two-dimensional beam steering at a fixed wavelength of λ = 905 nm (see Figure 6) [51]. To demonstrate the functionality of the OPA circuit, we put in place a set-up that allows waferlevel beam calibration of the far field emission.…”

Section: Sin For Near Infrared Lidarmentioning

confidence: 99%

A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

et al. 2019

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Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800–1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.

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“…Changing the position ϑ of the maximum of the radiation pattern, requires modifying the phase ϕ of the individual emitters. For this purpose, optical modulators are placed before each emitter, allowing for beam steering in the ϑ direction [14]. Optical modulators shift the phase ϕ by changing the refractive index n of the medium through which light propagates.…”

Section: Introductionmentioning

confidence: 99%

“…The emission angle ψ of the grating structures, used as optical emitters of the OPA, depends on the wavelength λ, therefore in combination with tunable lasers, they allow for two-dimensional beam steering [15]. Alternatively, using a 2D array of optical emitters, two-dimensional beam steering could be achieved using single wavelength lasers [8,14,16].…”

Section: Introductionmentioning

confidence: 99%

CMOS-Compatible Measures for Thermal Management of Phase-Sensitive Silicon Photonic Systems

2020

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To date, several photonic applications have been demonstrated without considerable thermal management efforts. However, in phase-sensitive photonic applications, thermal management becomes of utmost importance. Thermal management of photonic systems requires not only efficient heat dissipation, but also reduction of on-chip temperature gradients. Particularly in highly integrated systems, in which several components are integrated within a single photonic integrated circuit, the reduction of on-chip temperature gradients is necessary to guarantee the correct functionality of the system. Due to their high integration density as well as their extreme temperature sensitivity, optical phased arrays are ideal examples of a system, where thermal management is required. Ideally, thermal management solutions of such systems should not require additional power for operation. Therefore, it is desired to improve the heat dissipation and to reduce temperature gradients by structural modifications of the photonic circuit. Furthermore, to cope with the advantages of silicon photonics, thermal management solutions must be compatible with series fabrication processes. In this work, complementary metal–oxide–semiconductor (CMOS)-compatible measures for thermal management of silicon photonic integrated circuits are proposed and validated by characterization of in-house fabricated thermal demonstrators. The proposed concepts are extremely efficient not only in reducing temperature gradients, but also in improving the heat dissipation from integrated heat sources.

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SiN integrated optical phased arrays for two-dimensional beam steering at a single near-infrared wavelength

Cited by 104 publications

References 15 publications

Si Photonics for Practical LiDAR Solutions

Si Photonics for Practical LiDAR Solutions

A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

CMOS-Compatible Measures for Thermal Management of Phase-Sensitive Silicon Photonic Systems

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