2019 IEEE International Conference on Design &Amp; Test of Integrated Micro &Amp; Nano-Systems (DTS) 2019
DOI: 10.1109/dtss.2019.8914757
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Simultanious Angular and Linear Motion Detection Circuitry for a MEMS 6-DOF Piezoelectric IMU

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“…The analysis of voltage outputs relative to acceleration inputs is performed using a temporal FEM study [26]. The latter should be realized in practical conditions, since the structure should be permanently biased with drive voltage signals in order to be able to measure the angular velocity once applied.…”
Section: Linear Accelerationmentioning
confidence: 99%
“…The analysis of voltage outputs relative to acceleration inputs is performed using a temporal FEM study [26]. The latter should be realized in practical conditions, since the structure should be permanently biased with drive voltage signals in order to be able to measure the angular velocity once applied.…”
Section: Linear Accelerationmentioning
confidence: 99%