Simultaneously detecting transversal and longitudinal displacement with the dielectric metasurface
Zhiyu Zhang,
Chenghui Kuang,
Haofeng Zang
et al.
Abstract:The compact, sensitive, and multidimensional displacement measurement device plays a crucial role in semiconductor manufacture and high-resolution optical imaging. The metasurface offers a promising solution to develop high-precision displacement metrology. In this work, we proposed and experimentally demonstrated a two-dimensional displacement (XZ) measurement device by a dielectric metasurface. Both transversal and longitudinal displacements of the metasurface can be obtained by the analysis of the interfere… Show more
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