Simultaneous thickness variation and surface profiling of glass plates using Fizeau interferometer with elimination of offset phase error

Bae, Won-Byong; Kim, Yangjin; Moon, Young Hoon; Hibino, Kenichi; Sugita, Naohiko; Mitsuishi, Mamoru

doi:10.1016/j.optcom.2020.126500

Cited by 14 publications

(2 citation statements)

References 45 publications

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“…A great deal of research has gone into the sensitivity to vibration and phase error or noise through various data-processing algorithms (9)(10)(11), thus it is necessary to consider whether different algorithms have an impact on ITF measurement. In order to characterize the difference in ITF measurement caused by algorithm processing, the algorithm transfer function (ATF) is proposed here.…”

Section: The Algorithm Transfer Functionmentioning

confidence: 99%

The influence of phase-shifting algorithms on the instrument transfer function in a Fizeau interferometer

Zhang

Qi²,

et al. 2022

Optical Metrology and Inspection for Industrial Applications IX

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The phase-shifting algorithms are essential for a Fizeau interferometer to reconstruct the topography of the optical element’s surface or wavefront. There are differences between different algorithms for reconstruction results, especially for the suppression of noise. To acquire a more accurate Instrument transfer function (ITF) which reflects the axial spatial frequency response of a Fizeau interferometer, the algorithm transfer function which represents the characteristics of the calculation process in spatial frequency was proposed. In this paper, numerical simulations calculated and analyzed several transfer functions of the well-known phase-shifting algorithms. Then, the ITFs of a step plate with a height of 118 nm were measured with different algorithms by experiments and the results were analyzed. The simulations and experimental results indicate that the phase-shifting algorithm has an effect on the ITF measurement but it is not a key factor affecting the ITF measurement.

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Section: The Algorithm Transfer Functionmentioning

confidence: 99%

The influence of phase-shifting algorithms on the instrument transfer function in a Fizeau interferometer

Zhang

Qi²,

et al. 2022

Optical Metrology and Inspection for Industrial Applications IX

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“…The reliable estimation of surface profile of a test specimen is an important requirement in the scientific, technological and industrial domains for material characterization and inspection [1][2][3][4]. For non-invasive surface profile measurement, optical interferometric techniques such as scanning white light interferometer [5], phase shifting interferometer [6,7], Fizeau interferometer [8,9] and digital holography [10,11] have gained widespread adoption due to their non-contact operation, good resolution, and high throughput. A recent development in this domain is the advent of quantitative phase microscopy approach, where the principles of optical microscopy and quantitative phase metrology are combined, and this has spawned several techniques such as Fourier phase microscopy [12,13], Hilbert phase microscopy [14,15], digital holographic microscopy [16][17][18], spatial light interference microscopy [19,20] and diffraction phase microscopy [21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

Nanoscale surface profile measurement using state space approach in digital holographic microscopy

Pandey

Gannavarpu

2023

Surf. Topogr.: Metrol. Prop.

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Surface profile measurement at the nanoscale level has important applications in non-destructive testing and evaluation. The paper proposes a robust method for surface profilometry using digital holographic microscopy setup. The proposed method relies on extracting the phase map encoded in the hologram signal, which directly corresponds to the surface profile, using state space approach. The main advantage of the proposed method is high robustness against noise, which is demonstrated using numerical simulations. For designing the experimental system, a combination of Raspberry-Pi computer and camera module is used for hologram acquisition and processing, which is a step towards low cost imaging. For surface profile measurement, the experimental system has both temporal and spatial sensitivity parameters within 5 nanometers, which indicates robust design. In addition, experimental results show that the proposed method shows superior performance compared to the existing methods for measuring 100 nanometers surface profile features corresponding to different micro-structure regions of a standard calibration test target. Overall, the proposed method allows for single shot, non-contact and full-field measurement of nanoscale surface profile with additional benefits of noise robustness and low cost imaging design.

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Interferometric thickness measurement of glass plate by phase-shifting analysis using wavelength scanning with elimination of bias phase error

Kim

Shin

et al. 2021

Opt Rev

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Simultaneous thickness variation and surface profiling of glass plates using Fizeau interferometer with elimination of offset phase error

Cited by 14 publications

References 45 publications

The influence of phase-shifting algorithms on the instrument transfer function in a Fizeau interferometer

The influence of phase-shifting algorithms on the instrument transfer function in a Fizeau interferometer

Nanoscale surface profile measurement using state space approach in digital holographic microscopy

Interferometric thickness measurement of glass plate by phase-shifting analysis using wavelength scanning with elimination of bias phase error

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