We studied isothermal hydrogen desorption from a Si(111)1Â1 surface at temperatures of~711, 732, 752, and 771 K by observing sum frequency generation (SFG). Peak shift and width broadening of the Si-H vibration occurred with increase of heating time. We also obtained SFG intensity images of monohydride species on the surface after heating for 10 s at temperatures of 592, 625, 666, 728, and 752 K. The SFG intensity images with a spatial resolution of 5 mm indicated that the hydrogen desorption was homogeneous. This result suggests that the hydrogen atoms diffused homogeneously on the Si(111)1Â1 surface.