Simultaneous micromachining with beam splitting of ultrashort laser pulses at high average power for the productive fabrication of microchannels

Cirakoglu, Kathrin; Holder, Daniel; Richmond, Aaron; Flamm, Daniel; Grossmann, Daniel; Sutter, Dirk; Hagenlocher, Christian; Graf, Thomas

doi:10.1016/j.procir.2024.08.207

Procedia CIRP

2024

DOI: 10.1016/j.procir.2024.08.207

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Simultaneous micromachining with beam splitting of ultrashort laser pulses at high average power for the productive fabrication of microchannels

Kathrin Cirakoglu,

Daniel Holder,

Aaron Richmond

et al.

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Simultaneous micromachining with beam splitting of ultrashort laser pulses at high average power for the productive fabrication of microchannels

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References 15 publications

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