2016
DOI: 10.1364/oe.24.014053
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Simultaneous measurement of temperature and refractive index using focused ion beam milled Fabry-Perot cavities in optical fiber micro-tips

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Cited by 88 publications
(34 citation statements)
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“…Such values correspond to the effect of temperature variation but also to the effect of water refractive index variation due to thermo-optic effects. In order to obtain a correct response of the sensor to water refractive index variations, one need to remove the temperature behavior in air [22]. The temperature sensitivity of the structure in air is 10.2 pm/°C and 20.6 pm/°C, respectively for the MZI and MKR.…”
Section: Experimental Setup and Resultsmentioning
confidence: 99%
“…Such values correspond to the effect of temperature variation but also to the effect of water refractive index variation due to thermo-optic effects. In order to obtain a correct response of the sensor to water refractive index variations, one need to remove the temperature behavior in air [22]. The temperature sensitivity of the structure in air is 10.2 pm/°C and 20.6 pm/°C, respectively for the MZI and MKR.…”
Section: Experimental Setup and Resultsmentioning
confidence: 99%
“…The focused ion beam uses a set of electromagnetic lenses to focus a beam of ions on the surface of a sample. Compared with the electrons in the SEM technique, the ions have a much larger mass as well as a larger size and thus will eject material from the surface on which they are focused [207]. The FIB technology based on this interaction has proven to be a perfect candidate for micro-machining and nano-fabrication by taking its advantages such as small and controllable spot size in nanometer scale and high beam current density.…”
Section: Focused Ion Beam (Fib) Micro-machined Devicesmentioning
confidence: 99%
“…Coating was also put onto the FPI walls to increase the mirror reflectivity by a factor of about 26 [211], which has been demonstrated with a high sensitivity on a wide RI measurement range [212]. Recently, a multi-cavity structure was fabricated by the FIB technique by combining the concepts of solid silica cavity and gap cavity [207]. The structure was analyzed using a fast Fourier transform (FFT) method to demultiplex the signals of each cavity.…”
Section: Focused Ion Beam (Fib) Micro-machined Devicesmentioning
confidence: 99%
“…The sensing applications for this configuration are vast, ranging from strain [5], pressure [6], magnetic field [7] and temperature [8]. Cavity fabrication can be achieved by using chemical etching [9], fiber Bragg Gratings (FBGs) serving as mirrors [10], micromachining [11] or by the use of fusion splicing [12]. The fusion splicing technique differentiates itself as an easy, fast and low cost fabrication method without chemical hazards.…”
Section: Introductionmentioning
confidence: 99%