2009
DOI: 10.1364/ao.48.001784
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Simultaneous measurement of linear and transverse displacements by laser self-mixing

Abstract: We present a contactless optical sensor based on the laser-self-mixing effect for real-time measurement of linear and transverse displacements of a moving stage. The sensor is able to measure linear displacements of up to 400 mm along the main optical axis while simultaneously estimating straightness and flatness deviations up to 1 mm. The sensor exploits two identical coplanar nonparallel self-mixing interferometers and requires only one reference plane. The reduction in the number of optical elements allowed… Show more

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Cited by 17 publications
(8 citation statements)
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“…from moderate to weak or vice versa) which may require further signal processing [1], [2]. A look into large displacement SM sensors reported earlier indicates that the use of co-operative targets has allowed avoiding speckle effect [5] and even helped in improving measurements by an order of magnitude [9]. On the other hand, long range SM displacement sensing has also been achieved by electronically keeping the operating point of the SM interferometer fixed at the half-fringe [10] though the sensor still requires additional optical components.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…from moderate to weak or vice versa) which may require further signal processing [1], [2]. A look into large displacement SM sensors reported earlier indicates that the use of co-operative targets has allowed avoiding speckle effect [5] and even helped in improving measurements by an order of magnitude [9]. On the other hand, long range SM displacement sensing has also been achieved by electronically keeping the operating point of the SM interferometer fixed at the half-fringe [10] though the sensor still requires additional optical components.…”
Section: Introductionmentioning
confidence: 99%
“…S ELF-MIXING (SM) or optical feedback interferometry [1]- [3] has been regularly used for displacement sensing [4], [5] though the presence of speckle [6] has often reduced the range or even the possibility of correct measurement. Traditionally, efforts have been invested to avoid speckle, mostly by tracking the strong signal by means of electro-mechanical actuators.…”
Section: Introductionmentioning
confidence: 99%
“…In the first case, a diffusive target can be employed to reduce the backscattered radiation re -entering the laser source; however, this solution implies a signal fading over long-distances due to the speckle effect. The alternative choice is represented by the reduction of the distance between the laser diode and the collimating lens, in order to obtain a divergent laser beam whose power losses through the finite aperture optical elements (lens and diode facet) will compensate the linear increase of the feedback parameter C with the target distance with no need of attenuation filter along the optical path [19].…”
Section: Measurement Of Linear Displacementsmentioning
confidence: 99%
“…Even if speckle occurs [11], SM operating regime can be made stable [12]. As each fringe corresponds to half wavelength (λ/2) target displacement so λ/2 sensor resolution can be easily achieved by using classical fringe counting [13].…”
Section: Introductionmentioning
confidence: 99%